المؤلفون: Stuart, G.C., Camm, D.M., Cibere, J., Kaludjercic, L., Kervin, S.L., Lu, B., McDonnell, K.J., Tam, N.

المصدر: 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors Advanced thermal processing of semiconductors Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of. :77-85 2002

Relation: 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002