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1
المؤلفون: Koichi Kanno, Naoya Hayashi, Masaaki Kurihara, Koji Ichimura
المصدر: Photomask Technology 2018.
مصطلحات موضوعية: Fabrication, Computer science, business.industry, Replica, Replication (computing), Nanoimprint lithography, law.invention, Template, Resist, law, Node (circuits), business, Lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9f7d1b3b57bb9e10115371a908f5ff87
https://doi.org/10.1117/12.2501754 -
2
المؤلفون: Naoya Hayashi, Masaaki Kurihara, Koji Ichimura, Koichi Kanno
المصدر: Novel Patterning Technologies 2018.
مصطلحات موضوعية: Fabrication, Computer science, business.industry, Nanoimprint lithography, law.invention, Template, Resist, law, Node (circuits), Photomask, business, Lithography, Next-generation lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::426d7d737559b875c4c8747547ef795d
https://doi.org/10.1117/12.2299778 -
3
المؤلفون: Masaaki Kurihara, Harada Saburo, Naoya Hayashi, Koichi Kanno, Ryugo Hikichi, Koji Ichimura
المصدر: Emerging Patterning Technologies.
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, 010401 analytical chemistry, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Nanoimprint lithography, law.invention, Template, law, Multiple patterning, Optoelectronics, X-ray lithography, Photolithography, 0210 nano-technology, business, Lithography, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1382d9f1e93a40fc85c78d15a146a5e0
https://doi.org/10.1117/12.2263460 -
4
المؤلفون: Hiroyuki Miyashita, Masayuki Kuribara, Daisuke Hara, Tsutomu Murakawa, Koichi Kanno, Shingo Yoshikawa, Soichi Shida, Linyong Pang, Nobuaki Fujii, Katsuya Hayano, Shohei Matsushita, Jun Matsumoto, Hidemichi Imai, Takayuki Nakamura
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering drawing, Engineering, business.industry, Hardware_PERFORMANCEANDRELIABILITY, Metrology, Software, Feature (computer vision), Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Node (circuits), Wafer, Photomask, business, Lithography, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::702bf8c76b287c654810b369e445feae
https://doi.org/10.1117/12.2197818 -
5
المؤلفون: Linyong Pang, Masayuki Kuribara, Daisuke Hara, Hidemichi Imai, Katsuya Hayano, Nobuaki Fujii, Tsutomu Murakawa, Jun Matsumoto, Takayuki Nakamura, Koichi Kanno, Soichi Shida, Hiroyuki Miyashita, Shohei Matsushita, Shingo Yoshikawa
المصدر: Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII.
مصطلحات موضوعية: Engineering, business.industry, Computational lithography, Numerical aperture, law.invention, Optics, law, Multiple patterning, Electronic engineering, Photolithography, Photomask, business, Lithography, Next-generation lithography, Maskless lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e391f02a1e1bf4677f8ad94d8543b9d0
https://doi.org/10.1117/12.2197617 -
6
المؤلفون: Koichi Kanno, Masaki Satake, Vikram Tolani, Hiroyuki Miyashita, Kana Ohara, Masaharu Nishiguchi, Donghwan Son
المصدر: Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII.
مصطلحات موضوعية: Matching (statistics), Engineering, Spectrum analyzer, Engineering drawing, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Integrated circuit layout, Image (mathematics), Software, Calibration, Computer vision, Artificial intelligence, Photomask, business, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::619afb90990acf774516d704fa7d7c53
https://doi.org/10.1117/12.2197609 -
7
المؤلفون: Shingo Yoshikawa, Naoya Hayashi, Anto Yasaka, Osamu Matsuda, Tomokazu Kozakai, Hiroyuki Miyashita, Koichi Kanno, Fumio Aramaki
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Optics, Materials science, Etching (microfabrication), business.industry, Scanning electron microscope, Transmittance, Phase-shift mask, Photomask, business, Focused ion beam, Aerial image, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::64cdb9145baf8937b7239a0af292999b
https://doi.org/10.1117/12.2069435 -
8
المؤلفون: Makoto Komatsu, Isao Mochida, Nobuyuki Koike, Koichi Kanno, Yozo Korai
المصدر: Carbon. 37:195-201
مصطلحات موضوعية: Brick, Fire brick, Materials science, Carbonization, Thermosetting polymer, Mesophase, General Materials Science, General Chemistry, Graphite, Composite material, Porosity, Shrinkage
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9
المؤلفون: Koichi Kanno, Yozo Korai, Isao Mochida, Nobuyuki Koike
المصدر: Carbon. 36:869-874
مصطلحات موضوعية: Materials science, Hydrogen, Carbonization, Mesophase, chemistry.chemical_element, Thermosetting polymer, General Chemistry, Microstructure, Chemical engineering, chemistry, Organic chemistry, General Materials Science, Texture (crystalline), Pyrolysis, Carbon
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10
المؤلفون: J.J. Fernández, Isao Mochida, Koichi Kanno, Francois Fortin, Yozo Korai
المصدر: Carbon. 35:1627-1637
مصطلحات موضوعية: Materials science, Carbonization, Gas evolution reaction, Mesophase, chemistry.chemical_element, General Chemistry, Carbon black, chemistry, medicine, General Materials Science, Absorption (chemistry), Composite material, Swelling, medicine.symptom, Pyrolysis, Carbon