-
1
المؤلفون: Marianna Pantouvaki, Gerald Beyer, Hugo Bender, Koen Marrant, Farid Sebaai, Alain Moussa, Herbert Struyf, J. Versluijs, Bart Vereecke, Danny Goossens, Rudy Caluwaerts, Els Van Besien, Kristof Kellens
المصدر: Microelectronic Engineering. 88:1618-1622
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Low-k dielectric, Integrated circuit, Condensed Matter Physics, Capacitance, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, law, Multiple patterning, Optoelectronics, Electrical and Electronic Engineering, Air gap (plumbing), business, Scaling, Reliability (statistics)
-
2
المؤلفون: Daire J. Cott, Marc Heyns, Guido Groeseneken, Nicolo Chiodarelli, Philippe M. Vereecken, Kai Arstila, Kristof Kellens, Nick Peys, Stefan De Gendt
المصدر: ECS Transactions. 19:11-24
مصطلحات موضوعية: Materials science, Yield (engineering), Renewable Energy, Sustainability and the Environment, chemistry.chemical_element, Polishing, Nanotechnology, Chemical vapor deposition, Carbon nanotube, Tungsten, Condensed Matter Physics, Electrochemistry, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Characterization (materials science), chemistry, law, Materials Chemistry, Deposition (phase transition), Cobalt
-
3
المؤلفون: Youssef Travaly, O. Richard, E. VanBesien, Gerald Beyer, Romano Hoofman, Roel Daamen, Marianna Pantouvaki, Henny Volders, M. Willegems, Elisabeth Camerotto, Aurelie Humbert, Kristof Kellens
المصدر: Microelectronic Engineering. 85:2071-2074
مصطلحات موضوعية: Materials science, Copper interconnect, Low-k dielectric, Dielectric, Chemical vapor deposition, Condensed Matter Physics, Capacitance, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Chemical-mechanical planarization, Electrical and Electronic Engineering, Composite material, Air gap (plumbing), Porosity
-
4
المؤلفون: Hugo Bender, W. S. Yoo, T. Xu, C. Liu, E. Vecchio, Hilde Tielens, E. Rohr, Stephan Brus, Anabela Veloso, H. Dekkers, A. Van Ammel, Anup Phatak, S. A. Chew, Geert Eneman, J. del Agua Borniquel, Vasile Paraschiv, Lars-Ake Ragnarsson, Naoto Horiguchi, Moon Ju Cho, Katia Devriendt, Aaron Thean, Kristof Kellens, Y. Crabbe, Eddy Simoen, Tom Schram, Higuchi Yuichi, X. Shi, Kun Xu, J. Geypen, M. Allen, Farid Sebaai, Paola Favia
المصدر: 2012 Symposium on VLSI Technology (VLSIT).
مصطلحات موضوعية: Materials science, business.industry, Electrical engineering, chemistry.chemical_element, Key features, Noise (electronics), PMOS logic, Reduction (complexity), chemistry, MOSFET, Optoelectronics, Process control, business, Tin, NMOS logic
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::db996fa6ccc399cb2c3ab0093ed510b3
https://doi.org/10.1109/vlsit.2012.6242447 -
5
المؤلفون: Stefan Kubicek, An Steegen, Moonju Cho, Liesbeth Witters, F. Sebai, Hugo Bender, Hilde Tielens, Thomas Kauerauf, Katia Devriendt, Geert Eneman, Naoto Horiguchi, M. Fukuda, Philippe Roussel, Lars-Ake Ragnarsson, K. De Meyer, Anabela Veloso, Tom Schram, G. Mannaert, E. Rohr, Stephan Brus, Geert Hellings, Andriy Hikavyy, S. Takeoka, S. Yamaguchi, Paola Favia, Blandine Duriez, Kristof Kellens, Y. Crabbe, Jerome Mitard, Jacopo Franco, Wei-E Wang, Roger Loo
المصدر: 2011 International Electron Devices Meeting.
مصطلحات موضوعية: Materials science, CMOS, Stack (abstract data type), Gate oxide, business.industry, Gate dielectric, Electrical engineering, Optoelectronics, Dielectric, business, Metal gate, Gate equivalent, AND gate
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8eb8f0f2797608ceae1e8205cc8bfb97
https://doi.org/10.1109/iedm.2011.6131633 -
6
المؤلفون: Jorge A. Kittl, Diziana Vangoidsenhoven, N. Jossart, Kristof Kellens, Sergiu Clima, Stefan Kubicek, Hugo Bender, Tom Vandeweyer, Dirk Wouters, Olivier Richard, Nancy Heylen, Bogdan Govoreanu, Yangyin Chen, Michal Rakowski, Vasile Paraschiv, Ludovic Goux, Katia Devriendt, Hilde Tielens, Luigi Pantisano, Beatrijs Verbrugge, Stephan Brus, Geoffrey Pourtois, L. Altimime, Gouri Sankar Kar, Robin Degraeve, Malgorzata Jurczak, Thomas Raes, Christoph Adelmann
المصدر: Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials.
مصطلحات موضوعية: Controllability, Materials science, Nanotechnology, Crossbar switch, Resistive random-access memory
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4bd44dc720eedb3865fc797d84cc9d53
https://doi.org/10.7567/ssdm.2011.f-7-2 -
7
المؤلفون: Gaetano Santoro, L. Carbonell, A. Cockburn, Li Yunlong, Virginie Gravey, Kavita Shah, Yuchun Wang, Leonardus Leunissen, Nancy Heylen, Kristof Kellens, Henny Volders, Zsolt Tokei, Gerald Beyer
المصدر: 2010 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Interconnection, Materials science, chemistry, Chemical-mechanical planarization, Compatibility (mechanics), Metallurgy, Hardware_INTEGRATEDCIRCUITS, Slurry, Copper interconnect, chemistry.chemical_element, Process optimization, Copper, Corrosion
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5747ba912c47e90b087115337aec16c0
https://doi.org/10.1109/iitc.2010.5510692 -
8
المؤلفون: J. Verluijs, V. Truffert, Geert Vandenberghe, J. De Backer, Marc Demand, E. Altamirano, M. Ercken, G. Mannaert, Christina Baerts, Anne Lauwers, Stephan Brus, T. Hoffman, S. Locorotondo, T. Vandeweyer, Andriy Hikavyy, W. Alaerts, Gerald Beyer, J. Hermans, Herbert Struyf, Serge Biesemans, Craig Huffman, Michal Rakowski, Nancy Heylen, C. Delvaux, Frederic Lazzarino, S. Verhaegen, Steven Demuynck, Henny Volders, Patrick Ong, Christa Vrancken, H. Dekkers, Philippe Absil, Kurt G. Ronse, Naoto Horiguchi, Kristof Kellens
المصدر: 2010 Symposium on VLSI Technology.
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Logic gate, MOSFET, Multiple patterning, Optoelectronics, Nanotechnology, business, Metal gate, Lithography, Integrated circuit layout, High-κ dielectric
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::defe254198501107a7ae29e809a1ce4a
https://doi.org/10.1109/vlsit.2010.5556133 -
9
المؤلفون: Efrain Altamirano Sanchez, Paul F. Ma, Johan Wouters, Qian Luo, Katia Devriendt, L. Carbonell, Jiang Lu, Murali Narasimhan, Kavita Shah, Arvind Sundarrajan, Virginie Gravey, Joseph F. Aubuchon, Gerald Beyer, Nancy Heylen, A. Cockburn, Rudy Caluwaerts, Kristof Kellens, Henny Volders, Zsolt Tokei
المصدر: 2009 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Materials science, business.industry, Annealing (metallurgy), Metallurgy, Tantalum, Oxide, chemistry.chemical_element, Corrosion, chemistry.chemical_compound, chemistry, Chemical-mechanical planarization, Optoelectronics, Inorganic materials, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9eec44fcb81fc30df62659a863637da8
https://doi.org/10.1109/iitc.2009.5090387 -
10
المؤلفون: Hugo Bender, Kristof Kellens, Bart Swinnen, Aleksandar Radisic, Chris Drijbooms, Philippe M. Vereecken, Ole Lühn, Geert Doumen, Wouter Ruythooren
المصدر: Scopus-Elsevier
مصطلحات موضوعية: Materials science, business.industry, law, Plating, Optoelectronics, Polishing, Integrated circuit, Electrochemistry, business, law.invention