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المؤلفون: Doohong Min, Jinha Park, Olivier Weber, Francois Wacquant, Alexandre Villaret, Eric Vandenbossche, Franck Arnaud, Emilie Bernard, Salim Elghouli, Christian Boccaccio, Laurent Favennec, Roberto Gonella, Jean Galvier, Jiyoung Yun, Jinwoo Park, Minuk Lee, Pyeongjun Yoon, Ilmin Lee, Heaseok Seo, Hoonsung Choi, Changbong Oh, Jinseok Kang, Sewan Park, Hyunjong Lee, Youngju Choi, Inwhan Kim, Joohyun Jo, Yoonsoo Park, Jinchan Park, Youngja Lee, Jinhyeok Jung, Juwon Lee, Hana Jang, Jihun Kang, Jisoo Kwon, Joochan Kim, Shigenobu Maeda, Youngki Hong
المصدر: 2021 IEEE International Electron Devices Meeting (IEDM).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::339c1b9b82250f9e3ef22cf9ee1e4216
https://doi.org/10.1109/iedm19574.2021.9720542 -
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المؤلفون: Arnaud Tournier, L. Pinzelli, Francois Roy, D. Jeanjean, S. Hulot, F. Blanchet, Laurent Favennec, Didier Herault, C. Perrot, Francois Leverd, J.-P. Carrere, Helene Wehbe-Alause, S. Ricq, N. Cherault, P. Boulenc, C. Augier, Maxime Gatefait
المصدر: physica status solidi c. 11:50-56
مصطلحات موضوعية: Materials science, CMOS, business.industry, Optoelectronics, Image sensor, Condensed Matter Physics, business
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المصدر: ECS Transactions. 45:225-232
مصطلحات موضوعية: Materials science, Shallow trench isolation, Petrology
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المصدر: Advanced Interconnects for ULSI Technology
مصطلحات موضوعية: symbols.namesake, Materials science, Plasma-enhanced chemical vapor deposition, UV curing, symbols, Young's modulus, Composite material, Curing (chemistry)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d85dcdeb3fe3453426ce556c2b525a64
https://doi.org/10.1002/9781119963677.ch2 -
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المساهمون: Clot, Marielle, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Journal of The Electrochemical Society
Journal of The Electrochemical Society, Electrochemical Society, 2012, pp.159, G49
Journal of The Electrochemical Society, 2012, pp.159, G49مصطلحات موضوعية: Materials science, Renewable Energy, Sustainability and the Environment, Materials Chemistry, Electrochemistry, Dielectric, Composite material, Thin film, Condensed Matter Physics, Porosity, ComputingMilieux_MISCELLANEOUS, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
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المؤلفون: Gérard Passemard, Vincent Jousseaume, Arnaud Castex, Laurent Favennec, J. Deval, J. Bruat
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:1343-1354
مصطلحات موضوعية: Silanes, Chemistry, Analytical chemistry, Oxide, Surfaces and Interfaces, Chemical vapor deposition, Condensed Matter Physics, Silane, Surfaces, Coatings and Films, chemistry.chemical_compound, Chemical engineering, Plasma-enhanced chemical vapor deposition, Molecule, Thin film, Organosilicon
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المؤلفون: S. Joblot, C. De-Buttet, Sébastien Petitdidier, F. Abbate, C. Jenny, Didier Celi, B. Ramadout, Thomas Quemerais, Sebastien Haendler, Laurent Favennec, Daniel Gloria, O. Robin, C. Richard, E. Canderle, B. Borot, K. Haxaire, N. Derrier, Remi Beneyton, Julien Rosa, G. Ribes, O. Saxod, P. Brun, Y. Campidelli, Pascal Chevalier, Cedric Durand, A. Montagne, Francois Leverd, G. Imbert, Olivier Gourhant, M. Guillermet, E. Gourvest, L. Berthier, Clement Tavernier, J. Cossalter, M. Buczko, C. Deglise, Mickael Gros-Jean, C. Julien, Jean-Damien Chapon, K. Courouble, D. Ney, G. Avenier, Patrick Maury, Y. Carminati, R. Bianchini, F. Foussadier
المصدر: 2014 IEEE International Electron Devices Meeting.
مصطلحات موضوعية: Bit cell, Materials science, business.industry, Heterojunction bipolar transistor, Electrical engineering, Ring oscillator, BiCMOS, Inductor, law.invention, Capacitor, CMOS, law, Extremely high frequency, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1a267063e241381b03eefae310424668
https://doi.org/10.1109/iedm.2014.7046978 -
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المؤلفون: J. Bruat, Laurent Favennec, Vincent Jousseaume, B. Remiat, A. Castex, Michel Pons, J. Deval, Gérard Passemard
المصدر: Microelectronic Engineering. 82:416-421
مصطلحات موضوعية: chemistry.chemical_classification, Analytical chemistry, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Dissociation (chemistry), Fourier transform spectroscopy, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Hydrocarbon, Fragmentation (mass spectrometry), chemistry, Plasma-enhanced chemical vapor deposition, Molecule, Electrical and Electronic Engineering, Fourier transform infrared spectroscopy, Cyclohexene oxide
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المؤلفون: O. Renault, Laurent Favennec, N. Rochat, Gérard Passemard, Vincent Jousseaume
المصدر: Materials Science in Semiconductor Processing. 7:301-305
مصطلحات موضوعية: Amorphous silicon, Materials science, Diffusion barrier, Passivation, Mechanical Engineering, Dangling bond, Analytical chemistry, Dielectric, Condensed Matter Physics, Carbide, Stress (mechanics), chemistry.chemical_compound, chemistry, Mechanics of Materials, Plasma-enhanced chemical vapor deposition, General Materials Science, Composite material
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المساهمون: Clot, Marielle, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Microelectronic Engineering
Microelectronic Engineering, Elsevier, 2008, pp.2102-2104
Microelectronic Engineering, 2008, pp.2102-2104مصطلحات موضوعية: 010302 applied physics, Materials science, Hydrogen, Low-k dielectric, chemistry.chemical_element, 02 engineering and technology, Plasma, Dielectric, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Chemical engineering, chemistry, 0103 physical sciences, UV curing, Electrical and Electronic Engineering, Thin film, 0210 nano-technology, Porosity, ComputingMilieux_MISCELLANEOUS, Curing (chemistry)