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1
المؤلفون: Mark W. Raynor, Paul Brabant, Joe Vininski, Manabu Shinriki, Robert Torres, Terry Francis
المصدر: Journal of Crystal Growth. 381:33-36
مصطلحات موضوعية: Materials science, Silicon, Hydrogen, Moisture, Analytical chemistry, chemistry.chemical_element, Contamination, Condensed Matter Physics, Epitaxy, Inorganic Chemistry, chemistry, Impurity, Materials Chemistry, Wafer, Area density
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2
المؤلفون: Alexander Reznicek, Manabu Shinriki, Devendra K. Sadana, Hong He, Satoshi Hasaka, Thomas N. Adam, Paul Brabant, Keith Chung, Terry Francis
المصدر: Thin Solid Films. 520:3175-3178
مصطلحات موضوعية: Materials science, business.industry, Metals and Alloys, Surfaces and Interfaces, Epitaxy, Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Metal, chemistry.chemical_compound, chemistry, Etching (microfabrication), Germane, visual_art, Materials Chemistry, visual_art.visual_art_medium, Optoelectronics, Field-effect transistor, Growth rate, business, Selectivity
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3
المؤلفون: Nobuyoshi Kobayashi, Katsumi Yoneda, Kaoru Sakota, Takahisa Ohno, Minoru Inoue, Tomoyuki Hamada, Nobuo Tajima, Kazuhiro Miyazawa, Yoshiaki Inaishi, Manabu Shinriki, Satoshi Hasaka, Seiichi Kondo
المصدر: Japanese Journal of Applied Physics. 46:5970-5974
مصطلحات موضوعية: Imagination, chemistry.chemical_classification, Materials science, Chemical substance, Physics and Astronomy (miscellaneous), media_common.quotation_subject, General Engineering, General Physics and Astronomy, Dielectric, law.invention, Molecular dynamics, Hydrocarbon, Magazine, Chemical engineering, chemistry, law, Silicon oxide, Science, technology and society, media_common
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4
المصدر: Bulletin of the Chemical Society of Japan. 76:2329-2333
مصطلحات موضوعية: Reduction (complexity), Chemistry, Inorganic chemistry, General Chemistry, Decomposition, Catalytic decomposition, Catalysis
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5d2cb5a26ae9ec1b4df8248423778ff9
https://doi.org/10.1246/bcsj.76.2329 -
5
المؤلفون: Scott Hasaka, Keith Chung, Terry Francis, Dane Scott, Hong He, Mark Wirzbicki, Paul Brabant, Manabu Shinriki, Devendra K. Sadana
المصدر: 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
مصطلحات موضوعية: Materials science, Silicon, Metallurgy, Oxide, Analytical chemistry, chemistry.chemical_element, Chemical vapor deposition, Contamination, Atomic layer deposition, chemistry.chemical_compound, chemistry, Impurity, Desorption, Thermal
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::409fb7244b7850a64c48fce3fbb8a12d
https://doi.org/10.1109/asmc.2011.5898202 -
6
المؤلفون: Minoru Inoue, Kaoru Sakota, Katsumi Yoneda, Satoshi Hasaka, Tomoyuki Hamada, Nobuo Tajima, Takahisa Ohno, Kazuhiro Miyazawa, Seiichi Kondo, Manabu Shinriki, Nobuyoshi Kobayashi
المصدر: Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials.
مصطلحات موضوعية: chemistry.chemical_classification, Hydrocarbon, Materials science, chemistry, Chemical engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8b35866ac1bb6f751e63d8ed59c36513
https://doi.org/10.7567/ssdm.2006.g-2-2 -
7
المصدر: ChemInform. 35
مصطلحات موضوعية: Reduction (complexity), Chemistry, Inorganic chemistry, General Medicine, Decomposition, Catalytic decomposition, Catalysis
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8
المؤلفون: Paul Brabant, Satoshi Hasaka, Hong He, Devendra K. Sadana, Keith Chung, Terry Francis, Manabu Shinriki
المصدر: ECS Meeting Abstracts. :865-865
مصطلحات موضوعية: chemistry.chemical_compound, Silanes, Materials science, chemistry, Inorganic chemistry, High order, Epitaxy, Silicon based
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9
المؤلفون: Yoshiaki Kintaichi, Manabu Shinriki, Tomohiro Yoshinari, Hideaki Hamada, Masaaki Haneda, Yukinori Nagao, Kazuhito Sato
المصدر: Scopus-Elsevier
مصطلحات موضوعية: Propene, chemistry.chemical_compound, Fuel Technology, chemistry, Chemical reduction, Energy Engineering and Power Technology, Mineralogy, Nitrogen oxide, Selective catalytic reduction, Selective reduction, Catalysis, Nuclear chemistry, Nitric oxide
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::33bfe3feb6248b43ed28950129a55094
http://www.scopus.com/inward/record.url?eid=2-s2.0-0036876302&partnerID=MN8TOARS