المؤلفون: Ramanathan, E., Jiang, L., Takmeel, Q., MaryClaire, S., Mahalingam, A.K.M., Ghosh, S., Donegan, K., Chandrasekar, A., Singh, S., Johanson, H., Damjanovic, D., Sun, Z., Sircar, A., Eah, S.-K., Bombardier, C., DaSilva, A., O'Brien, B., Roux, A., Cucci, B., Christopher, O., Montgomery, C., Venkatasubramanian, V., Rana, V., Mody, J., Shepard, J., Child, C., Morganfeld, B., Sheraw, R.

المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-4 May, 2019

Relation: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)