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1
المؤلفون: Brandon Hurt, Ryan Carlson, Yao Zhang, Xiaochun Yang, Masaki Satake, Yifu Wang, Derui Li, Vikram Tolani, Daniel Price
المصدر: International Conference on Extreme Ultraviolet Lithography 2022.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2876202d7fda11b7a731fd638bc880b1
https://doi.org/10.1117/12.2642401 -
2
المؤلفون: Peter Liu, Derui Li, Yao Zhang, Daniel Price, Ryan Gardner, Wallace Wang, Will Wang, Masaki Satake, George Hwa, Ryan Carlson, Vikram Tolani, Brandon Hurt
المصدر: Photomask Technology 2020.
مصطلحات موضوعية: Production line, Data collection, Computer science, Process (engineering), Semiconductor device fabrication, business.industry, Analytics, Data management, Systems engineering, Data analysis, Reticle, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::604eea499af845bedfee7b00b4674b1c
https://doi.org/10.1117/12.2573765 -
3
المؤلفون: Wonil Cho, Daniel Rost, Vikram Tolani, Daniel Price, Paul A. Morgan, Masaki Satake
المصدر: International Conference on Extreme Ultraviolet Lithography 2017.
مصطلحات موضوعية: Scanner, Computer science, business.industry, Feature (computer vision), Extreme ultraviolet lithography, Process (computing), Reticle, Computer vision, Mask inspection, Artificial intelligence, business, Grayscale, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::934273a2dc64e8e6e3de12a9a64901ff
https://doi.org/10.1117/12.2280837 -
4
المؤلفون: Masaki Satake, Dongxue Chen, Ying Li, Lin He, Peter Hu, Linyong Pang, Vikram Tolani, Danping Peng
المصدر: aot. 1:299-321
مصطلحات موضوعية: Engineering drawing, Computer science, business.industry, Computer vision, Mask inspection, Artificial intelligence, business, Instrumentation, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::db2497aabe398304b264588be2acdf6a
https://doi.org/10.1515/aot-2012-0127 -
5
المؤلفون: Shunichiro Miyoshi, Yuji Itabashi, Akira Furuta, Shinichiro Kira, Toshiaki Sato, Koutaro Fukumoto, Nobuhiro Nishiyama, Naoko Hida, Masaki Satake, Tatsuya Shimizu, Mitsuo Okano, Satoshi Ogawa
المصدر: Japanese Journal of Electrocardiology. 28:309-315
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a43a3811e8fd9bb3225e4edb4ce7341b
https://doi.org/10.5105/jse.28.309 -
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المؤلفون: Koichi Kanno, Masaki Satake, Vikram Tolani, Hiroyuki Miyashita, Kana Ohara, Masaharu Nishiguchi, Donghwan Son
المصدر: Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII.
مصطلحات موضوعية: Matching (statistics), Engineering, Spectrum analyzer, Engineering drawing, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Integrated circuit layout, Image (mathematics), Software, Calibration, Computer vision, Artificial intelligence, Photomask, business, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::619afb90990acf774516d704fa7d7c53
https://doi.org/10.1117/12.2197609 -
7
المؤلفون: Masaki Satake, Linyong Pang, Danping Peng, Peter Hu, Ying Li
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Wavelength, Optics, Materials science, Silicon, chemistry, business.industry, Extreme ultraviolet, Extreme ultraviolet lithography, Optoelectronics, chemistry.chemical_element, Process window, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::23c46f3aca7e44bd810d5c7e700594fa
https://doi.org/10.1117/12.2031092 -
8
المؤلفون: Ying Li, Linyong Pang, Peter Hu, Vikram Tolani, Dongxue Chen, Masaki Satake, Danping Peng
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Cross section (physics), Optics, Materials science, business.industry, Extreme ultraviolet lithography, Extreme ultraviolet, Phase (waves), Deposition (phase transition), Compensation methods, business, Blank, Compensation (engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ae6760ed936bb3db2333166db379c974
https://doi.org/10.1117/12.2028945 -
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المؤلفون: Dean Yonenaga, Shah Pinkesh Rohit, Paul A. Morgan, Daniel Rost, Noel Corcoran, Peter Hu, Danping Peng, Yulian Wolf, Daniel Price, Masaki Satake, Vikram Tolani
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Engineering, Resolution enhancement technologies, Computational lithography, business.industry, Process (computing), Mask inspection, Numerical aperture, law.invention, law, Computer vision, Artificial intelligence, Photolithography, Focus (optics), business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c1cb4d5c697752bae0938dc02a08a936
https://doi.org/10.1117/12.2027648 -
10
المؤلفون: Ying Li, Il-Yong Jang, Sungmin Huh, Ranganath Teki, Danping Peng, Vibhu Jindal, Masaki Satake, Seong-Sue Kim, Frank Goodwin
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, Optics, Dimension (vector space), business.industry, Extreme ultraviolet lithography, Phase (waves), Conformal map, Wafer, Luminescence, business, Algorithm, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8ae64b988a3824386785c60cb63d1bad
https://doi.org/10.1117/12.2028069