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1
المؤلفون: Masaya Kamiya, Kensuke Demura, Minami Nakamura, Kei Hattori
المصدر: Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5c13b71d5cbe6048f4c034877bd57ce6
https://doi.org/10.1117/12.2640652 -
2
المؤلفون: Kei Hattori, Masaya Kamiya, Matsushima Daisuke, Demura Kensuke
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 19
مصطلحات موضوعية: Materials science, Mechanical Engineering, Wet cleaning, 02 engineering and technology, Substrate (printing), 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, 010309 optics, chemistry.chemical_compound, chemistry, 0103 physical sciences, Fluid dynamics, Particle, Polystyrene, Electrical and Electronic Engineering, Composite material, 0210 nano-technology, Supercooling, Critical dimension, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b2344f420040e642c91c47d62b5b97c
https://doi.org/10.1117/1.jmm.19.4.044401 -
3
المؤلفون: Yusuke Kuramochi, Masaya Kamiya, Hitoshi Ishida
المصدر: Inorganic chemistry. 53(7)
مصطلحات موضوعية: Inorganic chemistry, Electron donor, Dimethylacetamide, Catalysis, Inorganic Chemistry, Solvent, chemistry.chemical_compound, Hydrolysis, chemistry, Photocatalysis, Formate, Physical and Theoretical Chemistry, Carbon monoxide, Nuclear chemistry
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4دورية أكاديمية
المؤلفون: Yusuke Kuramochi, Masaya Kamiya, Hitoshi Ishida
المصدر: Inorganic Chemistry; 4/7/2014, Vol. 53 Issue 7, p3326-3332, 7p