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المصدر: Key Engineering Materials. 742:158-164
مصطلحات موضوعية: 010302 applied physics, Materials science, Fabrication, Mechanical Engineering, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry, Mechanics of Materials, Aluminium, 0103 physical sciences, General Materials Science, Extrusion, Composite material, 0210 nano-technology
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المؤلفون: Peter Björnängen, Dirk Rudloff, Michael Wagner, Per Askebjer, Michael Müller, Peter Dürr, Matthias List, Jan-Uwe Schmidt, Martin Friedrichs, Ulrike Dauderstädt
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Spatial light modulator, Fabrication, Materials science, business.industry, Laser, law.invention, Optics, law, Chemical-mechanical planarization, Photolithography, business, Actuator, Layer (electronics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a73b209a7bd59886318e9abae3a5a9f
https://doi.org/10.1117/12.810787 -
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المؤلفون: Johannes Struempfel, Matthias List, Christian Melde, Claus Illgen
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Argon, Materials science, business.industry, Analytical chemistry, Niobium, chemistry.chemical_element, Sputter deposition, Optical coating, chemistry, Sputtering, Cavity magnetron, Homogeneity (physics), Optoelectronics, business, Refractive index
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ea482202abb3ca383159072ea694382a
https://doi.org/10.1117/12.512944