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المؤلفون: Georges Bremond, Delphine Le Cunff, I. Mica, Maxime Cannac, Romain Duru, José Baruchel, Thu-Nhi Tran-Thi
المصدر: IEEE Transactions on Semiconductor Manufacturing. 32:23-30
مصطلحات موضوعية: 0209 industrial biotechnology, Photoluminescence, Materials science, Silicon, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, chemistry.chemical_element, 02 engineering and technology, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, Characterization (materials science), 020901 industrial engineering & automation, CMOS, chemistry, Transmission electron microscopy, Etching (microfabrication), Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Wafer, Diffraction topography, Electrical and Electronic Engineering, business
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المصدر: Photomask Technology 2020.
مصطلحات موضوعية: Fabrication, Resist, business.industry, Computer science, Multiple patterning, Optoelectronics, Overlay, business, Lithography, Nanodevice, Maskless lithography, Electron-beam lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f1678a95303d1c001701c0d40366f567
https://doi.org/10.1117/12.2572868 -
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المؤلفون: Sylvain Joblot, Zoltan Kiss, I. Mica, L. Jastrzebski, B. Greenwood, Laszlo Dudas, Roffarello, A. Galbiati, Maxime Cannac, Maria Luisa Polignano, P. Basa, Gyorgy Nadudvari, M. Nagy, J.P. Gambino, Romain Duru, P. Monge, Imre Lajtos, G. Molnar, A. Pongracz, Delphine Le-Cunff
المصدر: 2019 19th International Workshop on Junction Technology (IWJT).
مصطلحات موضوعية: Photoluminescence, Materials science, Phonon, Band gap, Orders of magnitude (temperature), Spontaneous emission, Direct and indirect band gaps, Molecular physics, Energy (signal processing), Intensity (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7d698903e22a9f05f22b551a6875eb91
https://doi.org/10.23919/iwjt.2019.8802893 -
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المؤلفون: Gyorgy Nadudvari, Nicolas Laurent, Laszlo Dudas, Zoltan Kiss, Romain Duru, David Cseh, Maxime Cannac, Frederic Jay, Delphine Le-Cunff, Imre Lajtos
المصدر: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: 010302 applied physics, 0209 industrial biotechnology, Photoluminescence, Materials science, Silicon, business.industry, Semiconductor device fabrication, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, Line (electrical engineering), Metrology, 020901 industrial engineering & automation, Semiconductor, chemistry, Transmission electron microscopy, 0103 physical sciences, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b680fe17fdb7c3baac5e4cb7c94f8a00
https://doi.org/10.1109/asmc.2017.7969241