المؤلفون: Wmjm Wim Coene, Mbi Michel Habets, Siep Weiland, Rwh Ruben Merks

المساهمون: Control Systems, Control of high-precision mechatronic systems, Spatial-Temporal Systems for Control, Cyber-Physical Systems Center Eindhoven

المصدر: Imaging and Applied Optics 2015

مصطلحات موضوعية: Wavefront, Physics, Optics, business.industry, Extreme ultraviolet lithography, Multiphysics, Thermal, Actuator, business, Deformable mirror

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::08074560f8900cb6988fa6f61678e95e
https://doi.org/10.1364/aoms.2015.aom4b.2