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1
المؤلفون: Pascal Besson, Lukasz Borowik, Mickaël Rebaud, Virginie Enyedi, Laura Toselli, Marie Christine Roure, Eugénie Martinez
المصدر: Solid State Phenomena. 255:61-66
مصطلحات موضوعية: 010302 applied physics, Materials science, Aqueous solution, Condensation, Inorganic chemistry, Oxide, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Gallium arsenide, chemistry.chemical_compound, chemistry, Etching (microfabrication), 0103 physical sciences, Oxidizing agent, General Materials Science, 0210 nano-technology, Spectroscopy, Layer (electronics)
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2
المؤلفون: Philippe Rodriguez, Pascal Besson, Mickaël Rebaud, Virginie Loup, Eugénie Martinez, Marie-Christine Roure
المصدر: ECS Transactions. 69:243-250
مصطلحات موضوعية: Materials science, Wafer, Nanotechnology
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3
المصدر: Solid State Phenomena. 219:63-67
مصطلحات موضوعية: Fabrication, Materials science, Silicon, business.industry, chemistry.chemical_element, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Gallium arsenide, chemistry.chemical_compound, Semiconductor, chemistry, Etching (microfabrication), Optoelectronics, Microelectronics, General Materials Science, Wafer, Photonics, business