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1دورية أكاديمية
المؤلفون: Mirosław Puźniak, Wojciech Gajewski, Aleksandra Seweryn, Marcin T. Klepka, Bartłomiej S. Witkowski, Marek Godlewski, Robert Mroczyński
المصدر: Materials, Vol 16, Iss 6, p 2539 (2023)
مصطلحات موضوعية: HfOxNy, MOS, HiPIMS, reactive magnetron sputtering, thermal stability, electrical parameters, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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المؤلفون: Arkadiusz P. Gertych, Mariusz Zdrojek, Mirosław Puźniak, Wojtek Gajewski, Robert Mroczyński, Marcin Żelechowski, Jan Jamroz
المصدر: Microelectronic Engineering. 228:111332
مصطلحات موضوعية: 010302 applied physics, Permittivity, Materials science, business.industry, Gate dielectric, Pulsed DC, chemistry.chemical_element, 02 engineering and technology, Thermal treatment, Dielectric, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Hafnium, chemistry, Sputtering, 0103 physical sciences, Optoelectronics, Electrical and Electronic Engineering, Thin film, 0210 nano-technology, business