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1مؤتمر
المؤلفون: Mueller, Steve, Waechtler, Thomas, Hofmann, Lutz, Tuchscherer, Andre, Mothes, Robert, Gordan, Ovidiu, Lehmann, Daniel, Haidu, Francisc, Ogiewa, Marcel, Gerlich, Lukas, Ding, Shao-Feng, Schulz, Stefan E., Gessner, Thomas, Lang, Heinrich, Zahn, Dietrich R.T., Qu, Xin-Ping
المصدر: 2011 Semiconductor Conference Dresden Semiconductor Conference Dresden (SCD), 2011. :1-4 Sep, 2011
Relation: 2011 Semiconductor Conference Dresden (SCD)
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2دورية أكاديمية
المؤلفون: Mothes, Robert, Petzold, Holm, Jakob, Alexander, Rüffer, Tobias, Lang, Heinrich
المصدر: In Inorganica Chimica Acta 1 April 2015 429:227-236
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3دورية أكاديمية
المؤلفون: Melzer, Marcel, Waechtler, Thomas, Müller, Steve, Fiedler, Holger, Hermann, Sascha, Rodriguez, Raul D., Villabona, Alexander, Sendzik, Andrea, Mothes, Robert, Schulz, Stefan E., Zahn, Dietrich R.T., Hietschold, Michael, Lang, Heinrich, Gessner, Thomas
المصدر: In Microelectronic Engineering July 2013 107:223-228
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4دورية أكاديمية
المؤلفون: Salvan, Georgeta, Robaschik, Peter, Fronk, Michael, Müller, Steve, Waechtler, Thomas, Schulz, Stefan E., Mothes, Robert, Lang, Heinrich, Schubert, Christian, Thomas, Senoy, Albrecht, Manfred, Zahn, Dietrich R.T.
المصدر: In Microelectronic Engineering July 2013 107:130-133
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5
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6دورية أكاديمية
المؤلفون: Fronk, Michael, Müller, Steve, Waechtler, Thomas, Schulz, Stefan E., Mothes, Robert, Lang, Heinrich, Zahn, Dietrich R.T., Salvan, Georgeta
المصدر: In Thin Solid Films 1 May 2012 520(14):4741-4744
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7دورية أكاديمية
المؤلفون: Waechtler, Thomas, Ding, Shao-Feng, Hofmann, Lutz, Mothes, Robert, Xie, Qi, Oswald, Steffen, Detavernier, Christophe, Schulz, Stefan E., Qu, Xin-Ping, Lang, Heinrich, Gessner, Thomas
المصدر: In Microelectronic Engineering 2011 88(5):684-689
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8دورية أكاديمية
المصدر: In Journal of Organometallic Chemistry 2011 696(7):1409-1415
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9دورية أكاديمية
المؤلفون: Tuchscherer, André, Shen, Yingzhong, Jakob, Alexander, Mothes, Robert, Al-Anber, Mohammed, Walfort, Bernhard, Rüffer, Tobias, Frühauf, Swantje, Ecke, Ramona, Schulz, Stephan E., Gessner, Thomas, Lang, Heinrich
المصدر: In Inorganica Chimica Acta 2011 365(1):10-19
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10
المؤلفون: Dhakal, Dileep, Waechtler, Thomas, E. Schulz, Stefan, Gessner, Thomas, Lang, Heinrich, Mothes, Robert, Tuchscherer, Andre
المساهمون: Publica, Fraunhofer ENAS
مصطلحات موضوعية: ddc:621.3, ddc:540, Atomlagenabscheidung, Kupferoxide, Oberflächenchemie, Cu2O, ddc:620, Atomic force microscopy (AFM), Atomic layer deposition (ALD), Atomic concentration, Copper oxide, Cu(I) β diketonate, Cu precursor, In-situ X-ray photoelectron spectroscopy (XPS), Surface chemistry, Thermal disproportionation, Auger parameter
URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::99082dbbb0af10e99293e075cb7f8d5d
https://publica.fraunhofer.de/handle/publica/236579