المؤلفون: B. Ben Yahia, M.S. Amara, M. Gallard, N. Burle, S. Escoubas, C. Guichet, M. Putero, C. Mocuta, M.-I. Richard, R. Chahine, C. Sabbione, M. Bernard, L. Fellouh, P. Noé, O. Thomas

المصدر: Micro and Nano Engineering, Vol 1, Iss , Pp 63-67 (2018)

مصطلحات موضوعية: Electronics, TK7800-8360, Technology (General), T1-995

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2590007218300030; https://doaj.org/toc/2590-0072

URL الوصول: https://doaj.org/article/efe0ec581a7e4923851363076d921cfa

المؤلفون: Mathieu Bernard, B. Ben Yahia, Magali Putero, M. Gallard, Olivier P. Thomas, Cristian Mocuta, R. Chahine, M. Amara, C. Guichet, S. Escoubas, L. Fellouh, Pierre Noé, N. Burle, C. Sabbione, Marie-Ingrid Richard

المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Micro and Nano Engineering, Vol 1, Iss, Pp 63-67 (2018)
Micro and Nano Engineering
Micro and Nano Engineering, Elsevier, 2018, ⟨10.1016/j.mne.2018.10.001⟩
'Micro and Nano Engineering ', vol: 1, pages: 63-67 (2018)
Micro and Nano Engineering, 2018, ⟨10.1016/j.mne.2018.10.001⟩

مصطلحات موضوعية: In situ, Materials science, Silicon, Annealing (metallurgy), Thin films, chemistry.chemical_element, lcsh:TK7800-8360, 02 engineering and technology, 01 natural sciences, Isothermal process, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Phase-change materials, Stress (mechanics), Condensed Matter::Materials Science, law, Condensed Matter::Superconductivity, 0103 physical sciences, lcsh:Technology (General), Electrical and Electronic Engineering, Thin film, Crystallization, Composite material, Thermomechanical behaviour, 010302 applied physics, lcsh:Electronics, GeTe, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Amorphous solid, chemistry, lcsh:T1-995, sense organs, 0210 nano-technology, Stress measurements

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d5369b824964241d506db3bbb0fb608
http://www.sciencedirect.com/science/article/pii/S2590007218300030

المؤلفون: S. Escoubas, Mathieu Bernard, Cristian Mocuta, N. Burle, Pierre Noé, Olivier P. Thomas, Rebbeca R. Chahine, M. Amara, Philippe Kowalczyk, C. Guichet, Magali Putero, Marion Gallard, Marie-Ingrid Richard

المساهمون: Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), European Synchrotron Radiation Facility (ESRF), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)

المصدر: Acta Materialia
Acta Materialia, 2020, 191, pp.60-69. ⟨10.1016/j.actamat.2020.04.001⟩
Acta Materialia, Elsevier, 2020, 191, pp.60-69. ⟨10.1016/j.actamat.2020.04.001⟩

مصطلحات موضوعية: Diffraction, Materials science, Polymers and Plastics, Annealing (metallurgy), 02 engineering and technology, Precipitation, Stress, 01 natural sciences, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, Stress (mechanics), Lattice constant, Electrical resistance and conductance, law, 0103 physical sciences, Crystallization, Thin film, Composite material, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Sheet resistance, Chalcogenide, Metals and Alloys, GeTe, 021001 nanoscience & nanotechnology, Microstructure, Phase change materials, Electronic, Optical and Magnetic Materials, Ceramics and Composites, PCRAM, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 0210 nano-technology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::12fc61580c49e4e52e0c057ceeb9b7f1
https://hal.science/hal-02903073

المؤلفون: Michael Texier, N. Burle, Alain Portavoce, Anthony De Luca

المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)

المصدر: Defect and Diffusion Forum
Defect and Diffusion Forum, 2018, 383, pp.17-22. ⟨10.4028/www.scientific.net/DDF.383.17⟩
Defect and Diffusion Forum, Trans Tech Publications, 2018, 383, pp.17-22. ⟨10.4028/www.scientific.net/DDF.383.17⟩

مصطلحات موضوعية: Silicon, Materials science, Annealing (metallurgy), Iron, Analytical chemistry, Nucleation, chemistry.chemical_element, 02 engineering and technology, Tungsten, 01 natural sciences, Diffusion, chemistry.chemical_compound, 0103 physical sciences, Silicide, Oxidation, General Materials Science, Redistribution (chemistry), Dissolution, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, Radiation, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Secondary ion mass spectrometry, chemistry, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 0210 nano-technology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba46e0fc4837793ea7b5bae28d4b2585
https://hal.science/hal-02111609

المؤلفون: N. Burle, Anthony De Luca, Alain Portavoce, Catherine Grosjean, Stéphane Morata, Michael Texier

المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), STMicroelectronics [Rousset] (ST-ROUSSET), Ion Beam Services (IBS), IBS

المصدر: physica status solidi (c)
physica status solidi (c), Wiley, 2015, 12 (8), pp.1166-1169. ⟨10.1002/pssc.201400233⟩
physica status solidi (c), 2015, 12 (8), pp.1166-1169. ⟨10.1002/pssc.201400233⟩

مصطلحات موضوعية: Materials science, Precipitation (chemistry), diffusion, Oxide, Analytical chemistry, Atmospheric temperature range, Condensed Matter Physics, Crystallography, chemistry.chemical_compound, contamination, chemistry, Oxidizing agent, TEM, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Redistribution (chemistry), Wafer, oxide, Oxidation process, Dissolution, ComputingMilieux_MISCELLANEOUS

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fd9137eda30503df4218a70defa8c3bb
https://doi.org/10.1002/pssc.201400233

المؤلفون: Alain Portavoce, Anthony De Luca, Dominique Mangelinck, Giovanni Isella, N. Burle, Michael Texier

المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy

المصدر: Journal of Alloys and Compounds
Journal of Alloys and Compounds, Elsevier, 2017, 695, pp.2799-2811. ⟨10.1016/j.jallcom.2016.11.307⟩
Journal of Alloys and Compounds, 2017, 695, pp.2799-2811. ⟨10.1016/j.jallcom.2016.11.307⟩

مصطلحات موضوعية: Materials Chemistry2506 Metals and Alloys, Materials science, Alloy, Analytical chemistry, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, Atom probe, engineering.material, 01 natural sciences, law.invention, Metal, chemistry.chemical_compound, Nickel, law, Germano-silicides, Reactive diffusion, Silicon-germanium, Mechanics of Materials, Mechanical Engineering, 2506, 0103 physical sciences, Materials Chemistry, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, High-resolution transmission electron microscopy, Ohmic contact, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, Metals and Alloys, 021001 nanoscience & nanotechnology, chemistry, visual_art, visual_art.visual_art_medium, engineering, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 0210 nano-technology, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cc0ded04458f2b6fe9e70217cf93f380
https://hal.archives-ouvertes.fr/hal-01694483

المؤلفون: Bernard Pichaud, C. Serafino, N. Burle, Julien Nicolai

المصدر: Journal of Crystal Growth. 372:138-144

مصطلحات موضوعية: Materials science, Annealing (metallurgy), Oxide, Nucleation, Mineralogy, Condensed Matter Physics, Isotropic etching, Inorganic Chemistry, chemistry.chemical_compound, chemistry, Chemical physics, Transmission electron microscopy, Materials Chemistry, Wafer, Fourier transform infrared spectroscopy, Silicon oxide

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9025b62b7e0e8d2478a2cc42a1c943ee
https://doi.org/10.1016/j.jcrysgro.2013.03.041

المؤلفون: Julien Nicolai, N. Burle, Bernard Pichaud

المصدر: Journal of Crystal Growth. 363:93-96

مصطلحات موضوعية: Laser scattering, Materials science, Annealing (metallurgy), Analytical chemistry, Electron, Condensed Matter Physics, Inorganic Chemistry, Crystallography, Transmission electron microscopy, Oxidizing agent, Materials Chemistry, Spectroscopy, Silicon oxide, Stoichiometry

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b5e015b9b7dc619d86ec6996bf393cfd
https://doi.org/10.1016/j.jcrysgro.2012.10.015

المؤلفون: S. Escoubas, Jürgen H. Werner, Michael Oehme, Erich Kasper, Klara Lyutovich, N. Burle

المصدر: physica status solidi c. 10:52-55

مصطلحات موضوعية: Diffraction, Crystallography, Materials science, Strain (chemistry), Condensed matter physics, X-ray crystallography, X-ray, Nucleation, Relaxation (physics), Condensed Matter Physics, Critical thickness, Molecular beam epitaxy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6a5bbf9d1f2c276771d11341f9ffc9f4
https://doi.org/10.1002/pssc.201200544

المؤلفون: Jürgen H. Werner, Michael Oehme, S. Escoubas, Jörg Schulze, Erich Kasper, N. Burle

المصدر: Thin Solid Films. 520:3195-3200

مصطلحات موضوعية: Materials science, Fabrication, business.industry, Infrared, Annealing (metallurgy), Metals and Alloys, chemistry.chemical_element, Germanium, Heterojunction, Surfaces and Interfaces, Epitaxy, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, symbols.namesake, chemistry, Materials Chemistry, symbols, Optoelectronics, Tin, business, Raman spectroscopy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7452b393edcc1448c413681d6b15803a
https://doi.org/10.1016/j.tsf.2011.10.114