المؤلفون: Rao, Avvaru Venkata Narasimha, Pal, Prem, Pandey, Ashok Kumar, Menon, P Krishna, Tanaka, Hiroshi, Sato, Kazuo

المصدر: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2020 Symposium on. :1-5 Jun, 2020

Relation: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

المؤلفون: Purohit, Soumya^Aff13, Swarnalatha, Veerla^Aff13, Pal, Prem^Aff13

المساهمون: Ceccarelli, Marco, Series Editor^Aff1, Agrawal, Sunil K., Advisory Editor^Aff2, Corves, Burkhard, Advisory Editor^Aff3, Glazunov, Victor, Advisory Editor^Aff4, Hernández, Alfonso, Advisory Editor^Aff5, Huang, Tian, Advisory Editor^Aff6, Jauregui Correa, Juan Carlos, Advisory Editor^Aff7, Takeda, Yukio, Advisory Editor^Aff8, Pandey, Ashok Kumar, editor^Aff9, Pal, Prem, editor^Aff10, Nagahanumaiah, editor^Aff11, Zentner, Lena, editor^Aff12

المصدر: Microactuators, Microsensors and Micromechanisms : MAMM 2022. 126:275-280

المؤلفون: Narasimha Rao, Avvaru Venkata^Aff13, Pal, Prem^Aff14

المساهمون: Ceccarelli, Marco, Series Editor^Aff1, Agrawal, Sunil K., Advisory Editor^Aff2, Corves, Burkhard, Advisory Editor^Aff3, Glazunov, Victor, Advisory Editor^Aff4, Hernández, Alfonso, Advisory Editor^Aff5, Huang, Tian, Advisory Editor^Aff6, Jauregui Correa, Juan Carlos, Advisory Editor^Aff7, Takeda, Yukio, Advisory Editor^Aff8, Pandey, Ashok Kumar, editor^Aff9, Pal, Prem, editor^Aff10, Nagahanumaiah, editor^Aff11, Zentner, Lena, editor^Aff12

المصدر: Microactuators, Microsensors and Micromechanisms : MAMM 2022. 126:281-289

المؤلفون: S. Purohit, V. Swarnalatha, A. K. Pandey, P. Pal

المصدر: Micro and Nano Systems Letters, Vol 10, Iss 1, Pp 1-10 (2022)

مصطلحات موضوعية: Silicon, Si{111}, Anisotropic etching, MEMS, NaOH, NH2OH, Technology

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2213-9621

URL الوصول: https://doaj.org/article/e4324c96c98f4ea5b272ae5dd2cd496d

المؤلفون: V. Swarnalatha, S. Purohit, P. Pal, R. K. Sharma

المصدر: Micro and Nano Systems Letters, Vol 10, Iss 1, Pp 1-8 (2022)

مصطلحات موضوعية: Silicon, MEMS, Wet bulk micromachining, Wet etching, NaOH, NH2OH, Technology

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2213-9621

URL الوصول: https://doaj.org/article/6deb5a9d65614875ad8eaf8b26d1029c

المؤلفون: Swarnalatha, V., Purohit, S., Pal, P.^{Aff1, IDs40486022001529_cor3}, Sharma, R. K.

المصدر: Micro and Nano Systems Letters. 10(1)

المؤلفون: Purohit, S., Swarnalatha, V., Pandey, A. K., Pal, P.^{Aff1, IDs40486022001627_cor4}

المصدر: Micro and Nano Systems Letters. 10(1)

المؤلفون: Prem Pal, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Ashok Kumar Pandey, Hiroshi Tanaka, Kazuo Sato

المصدر: Micro and Nano Systems Letters, Vol 9, Iss 1, Pp 1-59 (2021)

مصطلحات موضوعية: Wet anisotropic etching, Silicon, Micromachining, TMAH, KOH, NH2OH, Technology

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2213-9621

URL الوصول: https://doaj.org/article/76503e6a915d4cbfb8a3112cc69b1dea

المؤلفون: Pal, Prem^{Aff1, IDs40486021001290_cor1}, Swarnalatha, Veerla, Rao, Avvaru Venkata Narasimha, Pandey, Ashok Kumar, Tanaka, Hiroshi, Sato, Kazuo

المصدر: Micro and Nano Systems Letters. 9(1)

المؤلفون: Xiao, Pengying^Aff1, Ai, Shuo, Zhou, Jing, Luo, Xiaojing, Kang, Baowen, Feng, Li, Zhao, Tiantao^Aff1

المصدر: Environmental Science and Pollution Research. 27(30):37188-37198