يعرض 1 - 10 نتائج من 68 نتيجة بحث عن '"Nakarai, Hiroaki"', وقت الاستعلام: 0.78s تنقيح النتائج
  1. 1
    مؤتمر
    High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing

    المؤلفون: Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Saitou, Takashi

    المصدر: 2018 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2018 China. :1-7 Mar, 2018

    Relation: 2018 China Semiconductor Technology International Conference (CSTIC)

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  2. 2
    مؤتمر
    Development of 250W EUV light source for HVM lithography

    المؤلفون: Yamazaki, Taku, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Okamoto, Takeshi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Yamagida, Tatsuya, Shiraishi, Yutaka, Saitou, Takashi, Mizoguchi, Hakaru

    المصدر: 2017 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2017 China. :1-4 Mar, 2017

    Relation: 2017 China Semiconductor Technology International Conference (CSTIC)

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  3. 3
    مؤتمر
    Development of 250W EUV light source for HVM lithography

    المؤلفون: Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Yamada, Tsuyoshi, Yamazaki, Taku, Okazaki, Shinji, Saitou, Takashi

    المصدر: 2016 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2016 China. :1-4 Mar, 2016

    Relation: 2016 China Semiconductor Technology International Conference (CSTIC)

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  4. 4
    كتاب إلكتروني
    EUV Sources

    المؤلفون: Mizoguchi, HakaruAff2, Endo, AkiraAff2, Yanagida, TatsuyaAff2, Nakarai, HiroakiAff2, Oga, ToshihiroAff2, Du, Keming, Section editorAff3, Sugioka, Koji, Section editorAff4

    المساهمون: Sugioka, Koji, editorAff1

    المصدر: Handbook of Laser Micro- and Nano-Engineering. :429-491

    Degree: Ph.D

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  5. 5
    دورية
    Development progress of Sn-LPP EUV light source for inspection systems

    المؤلفون: Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Ronse, Kurt G., Nishimura, Yuichi, Ueno, Yoshifumi, Nagai, Shinji, Iwamoto, Fumio, Miyao, Kenichi, Hayashi, Hideyuki, Ishii, Takuya, Abe, Tamotsu, Nakarai, Hiroaki, Saitou, Takashi

    المصدر: Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p127500V-127500V-7, 1147508p

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  6. 6
    دورية
    High-power LPP-EUV source for semiconductor HVM: lithography and other applications

    المؤلفون: Itani, Toshiro, Naulleau, Patrick P., Gargini, Paolo A., Ronse, Kurt G., Mizoguchi, Hakaru, Nakarai, Hiroaki, Usami, Yasutsugu, Kakizaki, Kouji, Fujimoto, Junichi, Saitou, Takashi

    المصدر: Proceedings of SPIE; December 2022, Vol. 12292 Issue: 1 p122920X-122920X-6, 1106287p

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  7. 7
    دورية أكاديمية

    لا يتم عرض هذه النتيجة على الضيوف.

    View this record from ISI Web of Science
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  8. 8
    دورية
    Key technology development progress of the high power LPP-EUV light source

    المؤلفون: Lio, Anna, Burkhardt, Martin, Nishimura, Yuichi, Ueno, Yoshifumi, Nagai, Shinji, Iwamoto, Fumio, Miyao, Kenichi, Hayashi, Hideyuki, Watanabe, Yukio, Abe, Tamotsu, Nakarai, Hiroaki, Mizoguchi, Hakaru

    المصدر: Proceedings of SPIE; June 2022, Vol. 12051 Issue: 1 p120510T-120510T-15, 11930506p

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  9. 9
    دورية
    Development progress of Gigaphoton’s LPP EUV light source for inspection systems

    المؤلفون: Burkhardt, Martin, van Lare, Claire, Iwamoto, Fumio, Ueno, Yoshifumi, Nagai, Shinji, Miyao, Kenichi, Hayashi, Hideyuki, Ishii, Takuya, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi

    المصدر: Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p1295313-1295313-7

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  10. 10
    دورية
    Update of >300W high power LPP-EUV source challenge IV for semiconductor HVM

    المؤلفون: Ronse, Kurt G., Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Hendrickx, Eric, Mizoguchi, Hakaru, Tomuro, Hiroaki, Nishimura, Yuichi, Hosoda, Hirokazu, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Shiraishi, Yutaka, Yanagiga, Tatsuya, Soumagne, Georg, Iwamoto, Fumio, Nagai, Shinji, Ueno, Yoshifumi, Suganuma, Takashi, Niimi, Gouta, Yabu, Takayuki, Yamada, Tsuyoshi, Saitou, Takashi

    المصدر: Proceedings of SPIE; October 2021, Vol. 11854 Issue: 1 p118540K-118540K-18, 11735479p

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