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المؤلفون: Naonori Kita
المصدر: Optical Review. 16:305-312
مصطلحات موضوعية: Quantum optics, Pauli matrices, Computer science, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Optical polarization, Polarization (waves), Atomic and Molecular Physics, and Optics, symbols.namesake, Optics, Pupil function, symbols, Applied mathematics, Linear approximation, Matrix exponential, business, Optical aberration
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المؤلفون: Tomoyuki Matsuyama, Toshiharu Nakashima, Masayuki Murayama, Hajime Yamamoto, Katsushi Makino, Ayako Sukegawa, Naonori Kita, Kazuo Masaki, Shintaro Kudo, Junji Ikeda, Hajime Aoyama, Ryota Matsui, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Lens (optics), Scanner, Optics, law, business.industry, Computer science, Computational lithography, Reticle, Electronic engineering, Process window, business, Lithography, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::002b098c421495278258d9ef6e6e8e65
https://doi.org/10.1117/12.2046547 -
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المؤلفون: Tomoyuki Matsuyama, Naonori Kita, Masakazu Mori, Ryota Matsui, Yasushi Mizuno, Noriyuki Hirayanagi
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Generator (circuit theory), Computer science, business.industry, Computer vision, Process window, Artificial intelligence, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b9f8c4650f750967685c9216916e93b1
https://doi.org/10.1117/12.2011077 -
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المؤلفون: Hajime Aoyama, Takuya Kono, Tomoyuki Matsuyama, Akiko Mimotogi, Kazuya Fukuhara, Naonori Kita, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Physics, Diffraction, Contrast transfer function, business.industry, law.invention, Lens (optics), Optics, law, Chromatic aberration, Thermal, business, Refractive index, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2b98c644452baede3ad400b50c04e28f
https://doi.org/10.1117/12.2011691 -
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المؤلفون: Hajime Aoyama, Wolfgang Demmerle, Keiichi Tajima, Joachim Siebert, Naonori Kita, Yasushi Mizuno, Ryota Matsui, Tomoyuki Matsuyama, Noriyuki Hirayanagi, Hirohiko Izumi
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Resist, Computer science, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Computer vision, Process window, Wafer, Artificial intelligence, Semiconductor device, business, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bd5c05bb47959f3177af65c81dd28e27
https://doi.org/10.1117/12.2011353 -
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المؤلفون: Tomoyuki Matsuyama, Tomoya Noda, Naonori Kita, Ryota Matsui, Donis G. Flagello, Hajime Aoyama
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Variable (computer science), Computer science, Real-time computing, Process window, Degrees of freedom (mechanics), Algorithm
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::19c87d43d8fd788cc529352e70970470
https://doi.org/10.1117/12.2008267 -
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المؤلفون: Tomoyuki Matsuyama, Junji Ikeda, Ryota Matsui, Naonori Kita
المصدر: SPIE Newsroom.
مصطلحات موضوعية: Physics, Matching (statistics), Acoustics, Proximity effect (audio)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::57ce72fe76caab91d3524be64e1ad52a
https://doi.org/10.1117/2.1201205.004182 -
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المؤلفون: Tomoyuki Matsuyama, Junji Ikeda, Ryota Matsui, Naonori Kita
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Computer science, Zernike polynomials, business.industry, law.invention, Lens (optics), symbols.namesake, Resist, law, Distortion, symbols, Computer vision, Sensitivity (control systems), Artificial intelligence, business, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3d65f483771a393166ead16d038d37bc
https://doi.org/10.1117/12.916594 -
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المؤلفون: Tomoyuki Matsuyama, Ryota Matsui, Nobumichi Kanayamaya, Naonori Kita, Shane R. Palmer, Donis G. Flagello, Daniel Smith
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Loop (topology), Computer science, business.industry, Immersion (virtual reality), Computer vision, Artificial intelligence, business, Pupil
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::55b06a070bd5866952f8a0cd8448fc6b
https://doi.org/10.1117/12.879116 -
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المؤلفون: Tomoyuki Matsuyama, Naonori Kita, Yasushi Mizuno
المصدر: SPIE Proceedings.
مصطلحات موضوعية: symbols.namesake, Apodization, Computer science, business.industry, Zernike polynomials, symbols, Immersion (virtual reality), Computer vision, Artificial intelligence, business, Grayscale, Immersion lithography, Pupil
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::63a273b12b1c0484963baed710144a91
https://doi.org/10.1117/12.879395