المؤلفون: Ramanathan, Eswar, Katragadda, Veenadhar, Gasasira, Arthur, Muthee, Martin, Riendeau, Jeffrey, Hatzistergos, Michael, Mody, Jay, Teo, Kok Hin, Clements, Justin, Qiu, Jian, Wang, Qiushi, Nicolai, Petrov, Liao, Vincent, Hwang, Jung Tae, Krom, Raymond, Venkatasubramanian, Vandana, Bombardier, Colin, Ahmed, Shafaat, Montgomery, Christa, Brown, Owen, Smith, Lloyd, Cusick, Alan, Soler, Edwin, Evans, Bill

المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-4 May, 2019

Relation: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

المؤلفون: Han Wah Ng, Shao Beng Law, Nicolai Petrov, Shinichiro Kakita, San Leong Liew, Jonathan Rullan, Seungman Choi

المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).

مصطلحات موضوعية: Materials science, business.industry, Physical vapor deposition, Plating, Chemical-mechanical planarization, Copper interconnect, Optoelectronics, Dielectric substrate, Dielectric, business, Electrochemistry, Line (electrical engineering)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3d8dd3a7c54c8ad243e25e585c2065d1
https://doi.org/10.1109/iitc.2018.8430484

المؤلفون: Pietro Babighian, Muhammed Pallachali, Nicolai Petrov, Tamer Desouky, Teck Jung Tang, Fadi Batarseh, Deborah Ryan, Shweta Shokale, Mark Terry, Haizhou Yin, Rohan Deshpande, Jiechang Hou, Yixiao Zhang, Sang-Kee Eah, Rao Desineni, Feng Wang, Ahmed Khalil

المصدر: Photomask Technology.

مصطلحات موضوعية: Engineering, Engineering drawing, Yield (engineering), Silicon, business.industry, chemistry.chemical_element, Edge (geometry), chemistry, Electronic engineering, Process control, Process window, Upstream (networking), Wafer, business, Aerial image

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::379ffba485daca644e6c71206a0b34f3
https://doi.org/10.1117/12.2280568

المؤلفون: Kunal Shrotri, Jin Lu, Jim Hofmann, Thy Tran, Phillip J. Ireland, Allen McTeer, Vasil Antonov, Dale W. Collins, Nicolai Petrov, Hongqian Sun, Greg Herdt, Joseph T. Lindgren, Pratap Murali, T. Owens, Stefano Guerrieri, Rita J. Klein, Siddartha Kondoju, Shane Trapp, Yushi Hu, Kevin Titus

المصدر: ECS Transactions. 50:53-72

مصطلحات موضوعية: Physics, chemistry, chemistry.chemical_element, Line (text file), Scaling, Copper, Computational physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::00e51c922c3cc814176b8bd4894f8bab
https://doi.org/10.1149/05039.0053ecst

المؤلفون: Nicolai Petrov, Nicolai Atanasov, Uliana Paskaleva

المصدر: Faculty of Economics, SOUTH-WEST UNIVERSITY 'NEOFIT RILSKI', BLAGOEVGRAD, Economics and Management. 4(1):12-16

الإتاحة: https://ideas.repec.org/a/neo/journl/v4y2008i1p12-16.html

المؤلفون: Daniel Stritch, Jeff Barnes, Elizabeth Walker, Charles Valverde, Vincent Paneccasio, Christian Witt, Chen Xu, Qingyun Chen, Nicolai Petrov, Eugene Shalyt, Michael Pavlov

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Line resistance, Nanolithography, Materials science, Thin layers, Chemical engineering, chemistry, Phase composition, Metallurgy, Process control, chemistry.chemical_element, Material properties, Copper, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c355b3c265fb02e79ead267dff9f303e
https://doi.org/10.1117/12.632504

المؤلفون: Jin Lu, Thy Tran, Greg Herdt, Nicolai Petrov, Yushi Hu, Vasil Antonov, Dale Collins, Pratap Murali, Zishu Zhang, Sid Kondoju, Sam Ireland

المصدر: ECS Meeting Abstracts. :2505-2505

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::81495f5003af5d2dd4a066554e7e184b
https://doi.org/10.1149/ma2012-02/29/2505

المؤلفون: Qingyun Chen, Christian Witt, Nicolai Petrov, Charles Valverde, Daniel Stritch, Richard Hurtubise

المصدر: ECS Meeting Abstracts. :417-417

مصطلحات موضوعية: Materials science, chemistry, Metallurgy, Copper interconnect, chemistry.chemical_element, Cobalt, Copper

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::247191d881eef5af5ecc377f86a04be4
https://doi.org/10.1149/ma2006-01/10/417