المؤلفون: Feng, Peng, Tan, Taide, Ji, Yujie, Zhang, Yaxin, Nozawa, Toshihisa

المصدر: 2022 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2022 China. :1-3 Jun, 2022

Relation: 2022 China Semiconductor Technology International Conference (CSTIC)

المؤلفون: Gu, Xun, Kikuchi, Yoshiyuki, Nozawa, Toshihisa, Samukawa, Seiji

المصدر: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on. :1-2 Jun, 2014

Relation: 2014 IEEE Symposium on VLSI Technology

المؤلفون: Wang, Qiuhe, Chang, Xijiang, Kikuchi, Yoshiyuki, Inoue, Kumi. Y., Kubota, Tomohiro, Matsue, Tomokazu, Nozawa, Toshihisa, Samukawa, Seiji

المصدر: In International Journal of Electrochemical Science February 2018 13(2):1803-1812

المؤلفون: Kikuchi, Yoshiyuki, Chang, Xijiang, Sakakibara, Yasuaki, Inoue, Kumi Y., Matsue, Tomokazu, Nozawa, Toshihisa, Samukawa, Seiji

المصدر: In Carbon November 2015 93:207-216

المؤلفون: Kikuchi, Yoshiyuki, Wada, Akira, Kurotori, Takuya, Nakano, Masanori, Inoue, Kumi Y., Matsue, Tomokazu, Nozawa, Toshihisa, Samukawa, Seiji

المصدر: In Carbon February 2014 67:635-642

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المؤلفون: Ohmi, Tadahiro, ISHIKAWA, Hiraku, Nozawa, Toshihisa, Matsuoka, Takaaki, Teramoto, Akinobu, Hirayama, Masaki, Ito, Takashi

المصدر: Japanese Journal of Applied Physics. 47:2531-2534

مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Physics and Astronomy (miscellaneous), Diffusion barrier, Thermal resistance, General Engineering, General Physics and Astronomy, chemistry.chemical_element, Dielectric, Copper, Ion, Amorphous solid, Hydrocarbon, chemistry, Composite material, Deposition (law)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::61cfb001f549766b71236badb97dd0fa
https://doi.org/10.1143/jjap.47.2531

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المؤلفون: Tsutsumi, Takayoshi, Kondo, Hiroki, Hori, Masaru, Zaitsu, Masaru, Kobayashi, Akiko, Nozawa, Toshihisa, Kobayashi, Nobuyoshi

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:01A103-01A103

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=jairo_______::5bdadb630f6f61c649d610f2f0228608
https://nagoya.repo.nii.ac.jp/records/23915

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