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المؤلفون: Sang Dae Choi, Kyoung-Joon An, Min-Jun Choi, Ju-Yeoul Baek, Kwun-Bum Chung, O Dae Kwon
المصدر: Applied Science and Convergence Technology. 25:73-76
مصطلحات موضوعية: 010302 applied physics, Materials Science (miscellaneous), Analytical chemistry, 02 engineering and technology, General Medicine, Plasma, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Plasma-enhanced chemical vapor deposition, Sputtering, 0103 physical sciences, Surface roughness, Deposition (phase transition), Radio frequency, Electrical and Electronic Engineering, Physical and Theoretical Chemistry, 0210 nano-technology, Refractive index, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::758ed0bf4f05417af55f78f72896cbe8
https://doi.org/10.5757/asct.2016.25.4.73 -
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المؤلفون: O Dae Kwon, Yong-Hyeon Shin, Dae Jin Seong, Kang Woong Lee, Su Jin Yoo, Jung-Hyung Kim, Jae-Hong Jeon, Jong Hyun Seo, Hee Hwan Choe
المصدر: Solid State Phenomena. :327-330
مصطلحات موضوعية: Materials science, Plasma parameters, Analytical chemistry, Phase (waves), Plasma, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, symbols.namesake, Plasma parameter, symbols, Langmuir probe, General Materials Science, Plasma diagnostics, Capacitively coupled plasma, Atomic physics, Inductively coupled plasma
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ea4398cdcdbc2e19d751e6cd1104a8ea
https://doi.org/10.4028/www.scientific.net/ssp.124-126.327 -
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