المؤلفون: Carrere, J., Oberlin, J.-C., Haond, M.

المصدر: 2000 5th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.00TH8479) Plasma process-induced damage Plasma Process-Induced Damage, 2000 5th International Symposium on. :164-167 2000

Relation: 2000 5th International Symposium on Plasma Process-Induced Damage

المؤلفون: Even, R., Palleau, J., Oberlin, J.-C., Pantel, R., Laviale, D., Templier, F., Torres, J.

المصدر: Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology,Competitive Manufacturing for the Next Decade Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International. :240-246 1990

Relation: Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology,Competitive Manufacturing

المؤلفون: Oberlin, J. C., Amokrane, A., Beaumevieille, H., Stoquert, J. P.

المصدر: IEEE Transactions on Nuclear Science IEEE Trans. Nucl. Sci. Nuclear Science, IEEE Transactions on. 28(2):1225-1226 Apr, 1981

المؤلفون: Gosset, L.G ^∗, Arnal, V, Brun, Ph, Broekaart, M, Monget, C, Casanova, N, Rivoire, M, Oberlin, J.-C, Torres, J

المصدر: In Microelectronic Engineering 2003 70(2):274-279

المؤلفون: Pelletier, J., Pantel, R., Oberlin, J. C., Pauleau, Y., Gouy-Pailler, P.

المصدر: Journal of Applied Physics; 10/1/1991, Vol. 70 Issue 7, p3862, 5p, 1 Diagram, 2 Charts, 5 Graphs

مصطلحات موضوعية: THIN films, COPPER, CHEMICAL vapor deposition

المؤلفون: Joubert, O., Fiori, C., Oberlin, J. C., Paniez, P., Pelletier, J., Pons, M., Vachette, T., Weill, A.

المصدر: Journal of Applied Physics; 2/1/1991, Vol. 69 Issue 3, p1697, 6p, 1 Black and White Photograph, 7 Graphs

مصطلحات موضوعية: BIODEGRADATION, PLASMA gases

المؤلفون: Ferrieu, F., Vu, D. P., D’Anterroches, C., Oberlin, J. C., Maillet, S., Grob, J. J.

المصدر: Journal of Applied Physics; 10/15/1987, Vol. 62 Issue 8, p3458, 4p, 2 Charts, 1 Graph

مصطلحات موضوعية: OXYGEN, SILICON, ELLIPSOMETRY, TRANSMISSION electron microscopy, THIN films

المؤلفون: Golanski, A., Devine, R. A. B., Oberlin, J. C.

المصدر: Journal of Applied Physics; Sep1984, Vol. 56 Issue 6, p1572-1576, 5p

المؤلفون: Palleau, J., Jourdain, D., Oberlin, J. C., Alaimo, M., Argoud, G., Aubert, D., Beudon, M., Bouzid, M. J., Laviale, D., Templier, F., Torres, J., Palleau, J., Jourdain, D., Oberlin, J. C., Alaimo, M., Argoud, G., Aubert, D., Beudon, M., Bouzid, M. J., Laviale, D., Templier, F., Torres, J.

المصدر: Journal de Physique III; April 1993, Vol. 3 Issue: 4 p793-804, 12p

المؤلفون: Regolini, J. L., Bodnar, S., Oberlin, J. C., Ferrieu, F., Gauneau, M., Lambert, B., Boucaud, P.

المصدر: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1994, Vol. 12 Issue 4, p1015-1019, 5p