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1دورية أكاديمية
المؤلفون: John Sheil, Oscar Versolato, Vivek Bakshi, Howard Scott
المصدر: Atoms, Vol 11, Iss 10, p 130 (2023)
مصطلحات موضوعية: EUV source plasma, code comparison, atomic kinetics, laser absorption, Nuclear and particle physics. Atomic energy. Radioactivity, QC770-798
وصف الملف: electronic resource
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المؤلفون: Kirill V. Lezhnin, Samuel Totorica, Abdullah Hyder, John Sheil, Oscar Versolato, Ahmed Diallo, William Fox
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::56be97a5bccd25ec6c22c1d64c75fc1a
https://doi.org/10.1117/12.2658454 -
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المؤلفون: John Sheil, M. M. Basko, Ronnie Hoekstra, Oscar Versolato, D.J. Hemminga, Lucas Poirier, Wim Ubachs
المساهمون: Atoms, Molecules, Lasers, LaserLaB - Physics of Light, Quantum interactions and structural dynamics
المصدر: Plasma Sources Science and Technology, 30(10):105006, 1-10. IOP Publishing Ltd.
Hemminga, D J, Poirier, L, Basko, M M, Hoekstra, R, Ubachs, W, Versolato, O O & Sheil, J 2021, ' High-energy ions from Nd:YAG laser ablation of tin microdroplets : Comparison between experiment and a single-fluid hydrodynamic model ', Plasma Sources Science and Technology, vol. 30, no. 10, 105006, pp. 1-10 . https://doi.org/10.1088/1361-6595/ac2224
Plasma Sources Science and Technology, 30(10):105006. IOP PUBLISHING LTDمصطلحات موضوعية: Nd:YAG laser ablation, Range (particle radiation), Materials science, Laser ablation, ion energy distribution, Plasma, Condensed Matter Physics, Laser, Kinetic energy, plasma expansion, law.invention, Ion, radiation hydrodynamics, Wavelength, law, Nd:YAG laser, EUV lithography, YAG laser ablation [Nd], SDG 7 - Affordable and Clean Energy, Atomic physics
وصف الملف: application/pdf
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المؤلفون: Lars Behnke, Yahia Mostafa, Zoi Bouza, Adam Lassise, Lucas Poirier, John Sheil, Wim Ubachs, Oscar Versolato
المصدر: International Conference on Extreme Ultraviolet Lithography 2022.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0de6ad6e449190ee48a83a6ac2f6d433
https://doi.org/10.1117/12.2642234 -
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المؤلفون: O.G. Tjepkema, Subam Rai, A.W. Noordam, Harry T. Jonkman, Ronnie Hoekstra, Klaas Bijlsma, S. Koeleman, Oscar Versolato
المساهمون: Atoms, Molecules, Lasers, LaserLaB - Physics of Light, Quantum interactions and structural dynamics, Zernike Institute for Advanced Materials
المصدر: Rai, S, Bijlsma, K I, Koeleman, S, Tjepkema, O G, Noordam, A W, Jonkman, H T, Versolato, O O & Hoekstra, R 2020, ' Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface ', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 482, pp. 58-63 . https://doi.org/10.1016/j.nimb.2020.08.021
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 482, 58-63. Elsevier
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 482, 58-63. ELSEVIER SCIENCE BVمصطلحات موضوعية: Nuclear and High Energy Physics, Materials science, Physics::Instrumentation and Detectors, Kinetics, chemistry.chemical_element, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, Ion, LEIS, SDG 7 - Affordable and Clean Energy, Instrumentation, Scattering, Krypton, Mass ratio, 021001 nanoscience & nanotechnology, Copper, 0104 chemical sciences, chemistry, SRIM, Crystallite, Atomic physics, 0210 nano-technology, Single-collision scattering, Intensity (heat transfer)
وصف الملف: application/pdf
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المؤلفون: John Sheil, Hemminga, Diko J., Basko, Mikhail M., Wim Ubachs, Ronnie Hoekstra, Neukirch, Amanda J., James Colgan, Oscar Versolato
المساهمون: Quantum interactions and structural dynamics, Research unit Nuclear & Hadron Physics, Atoms, Molecules, Lasers, LaserLaB - Physics of Light
المصدر: Compact EUV and X-ray Light Sources, EUVXRAY 2022
Vrije Universiteit Amsterdam
University of Groningen
Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022
Compact EUV and X-ray Light Sources (EUVXRAY 2022)
Sheil, J, Hemminga, D J, Basko, M M, Ubachs, W, Hoekstra, R, Neukirch, A J, Colgan, J & Versolato, O O 2022, Recent Advances in Modeling Laser-Driven EUV Light Source Plasmas for Nanolithography . in Compact EUV and X-ray Light Sources (EUVXRAY 2022) : Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022 ., ETh5A.5, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Compact EUV and X-ray Light Sources, EUVXRAY 2022, Budapest, Hungary, 21/03/22 . < https://opg.optica.org/abstract.cfm?uri=EUVXRAY-2022-ETh5A.5 >URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28af4aa89dda67928f814cb9c75e49ca
https://hdl.handle.net/1871.1/425760a6-6f6f-4a5e-ab56-320bf525426f -
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المؤلفون: Oscar Versolato, Ruben Schupp, Lars Behnke, Mostafa, Yahia Y., Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, Wim Ubachs
المساهمون: XUV Optics, MESA+ Institute, Atoms, Molecules, Lasers, LaserLaB - Physics of Light, Research unit Nuclear & Hadron Physics, Quantum interactions and structural dynamics
المصدر: Compact EUV and X-ray Light Sources, EUVXRAY 2022
University of Groningen
Compact EUV and X-ray Light Sources (EUVXRAY 2022): Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022
Compact EUV and X-ray Light Sources (EUVXRAY 2022)
Vrije Universiteit Amsterdam
Versolato, O O, Schupp, R, Behnke, L, Mostafa, Y Y, Bouza, Z, Lassise, A, Bayraktar, M, Sheil, J, Hoekstra, R & Ubachs, W 2022, Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV . in Compact EUV and X-ray Light Sources (EUVXRAY 2022) : Proceedings Optica High-brightness Sources and Light-driven Interactions Congress 2022 ., ETh5A.7, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Compact EUV and X-ray Light Sources, EUVXRAY 2022, Budapest, Hungary, 21/03/22 . < https://opg.optica.org/abstract.cfm?uri=EUVXRAY-2022-ETh5A.7 >مصطلحات موضوعية: NLA
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5b142c1d21c93c233db14b495d788f0a
https://research.utwente.nl/en/publications/6989b874-c252-41aa-9f56-7fb7abe71407 -
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المؤلفون: Ruben Schupp, Randy Meijer, Oscar Versolato, Ronnie Hoekstra, Stefan Witte, John Sheil, Amanda Neukirch, M. M. Basko, Francesco Torretti, James Colgan, Muharrem Bayraktar, Wim Ubachs
المساهمون: Atoms, Molecules, Lasers, LaserLaB - Physics of Light, Quantum interactions and structural dynamics, XUV Optics
المصدر: Nature Communications, Vol 11, Iss 1, Pp 1-8 (2020)
Nature Communications, 11(1):2334, 1-8. Nature Publishing Group
Torretti, F, Sheil, J, Schupp, R, Basko, M M, Bayraktar, M, Meijer, R A, Witte, S, Ubachs, W, Hoekstra, R, Versolato, O O, Neukirch, A J & Colgan, J 2020, ' Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography ', Nature Communications, vol. 11, no. 1, 2334, pp. 1-8 . https://doi.org/10.1038/s41467-020-15678-y
Nature Communications
Nature Communications, 11(1):2334. Nature Publishing Group
Nature communications, 11(1):2334. Nature Publishing Groupمصطلحات موضوعية: Opacity, Extreme ultraviolet lithography, Science, General Physics and Astronomy, chemistry.chemical_element, 7. Clean energy, 01 natural sciences, General Biochemistry, Genetics and Molecular Biology, Spectral line, Article, 010305 fluids & plasmas, law.invention, law, Physics::Plasma Physics, LITHOGRAPHY LITHOGRAPHY, 0103 physical sciences, OPACITY, SPECTRA, Astrophysics::Solar and Stellar Astrophysics, 010306 general physics, lcsh:Science, TRANSITION ARRAYS, Physics, Multidisciplinary, General Chemistry, Plasma, Laser-produced plasmas, Laser, 3. Good health, Nanolithography, chemistry, Extreme ultraviolet, Physics::Space Physics, lcsh:Q, XIV, Atomic physics, Electronic structure of atoms and molecules, Tin
وصف الملف: application/pdf
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المساهمون: ARCNL, LaserLaB - Physics of Light, Atoms, Molecules, Lasers, Amsterdam Neuroscience - Brain Imaging, LaserLaB - Biophotonics and Microscopy
المصدر: 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC): [Proceedings]
2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC)
The European Conference on Lasers and Electro-Optics 2021 (CLEO): [Proceedings]
The European Conference on Lasers and Electro-Optics 2021 (CLEO)
Mazzotta, Z, Mathijssen, J, Eikema, K, Versolato, O & Witte, S 2021, TI-REX: A Tunable Infrared laser for Experiments in nanolithography . in 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC) : [Proceedings] . Institute of Electrical and Electronics Engineers Inc., 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021, Munich, Germany, 21/06/21 . https://doi.org/10.1109/CLEO/Europe-EQEC52157.2021.9542531
Mazzotta, Z, Mathijssen, J, Eikema, K, Versolato, O & Witte, S 2021, TI-REX: A tunable infrared laser for experiments in nanolithography . in The European Conference on Lasers and Electro-Optics 2021 (CLEO) : [Proceedings] ., Cd_p_28, Optics InfoBase Conference Papers, OSA-The Optical Society, 2021 European Conference on Lasers and Electro-Optics, CLEO/Europe 2021, Virtual, Online, Germany, 21/06/21 . < https://www.osapublishing.org/abstract.cfm?uri=CLEO_Europe-2021-cd_p_28 >مصطلحات موضوعية: Optical amplifier, Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Far-infrared laser, Laser, law.invention, Nanolithography, law, Extreme ultraviolet, Optoelectronics, Laser power scaling, SDG 7 - Affordable and Clean Energy, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2358513c65fe4d0607c22d5fec263048
https://research.vu.nl/en/publications/f83ce94f-b31f-40f1-993f-dd5c8166d0a1 -
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المؤلفون: Ronnie Hoekstra, Oscar Versolato, Ruben Schupp, Adam Lassise, John Sheil, Zeudi Mazzotta, Muharrem Bayraktar, Wim Ubachs, Yahia Mostafa, Lucas Poirier, Zoi Bouza, Lars Behnke
المساهمون: ARCNL, LaserLaB - Physics of Light, Atoms, Molecules, Lasers, XUV Optics, MESA+ Institute, Quantum interactions and structural dynamics
المصدر: Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics, 54(36):365103, 1-12. IOP Publishing Ltd.
Schupp, R, Behnke, L, Bouza, Z, Mazzotta, Z, Mostafa, Y, Lassise, A, Poirier, L, Sheil, J, Bayraktar, M, Ubachs, W, Hoekstra, R & Versolato, O O 2021, ' Characterization of angularly resolved EUV emission from 2-μm-wavelength laser-driven Sn plasmas using preformed liquid disk targets ', Journal of Physics D: Applied Physics, vol. 54, no. 36, 365103, pp. 1-12 . https://doi.org/10.1088/1361-6463/ac0b70
Journal of physics D: applied physics, 54(36):365103. Institute of Physics (IOP)
Journal of Physics D: Applied Physics, 54(36):365103. IOP PUBLISHING LTDمصطلحات موضوعية: Materials science, Acoustics and Ultrasonics, Extreme ultraviolet lithography, UT-Hybrid-D, FOS: Physical sciences, 02 engineering and technology, Applied Physics (physics.app-ph), 01 natural sciences, law.invention, Optics, law, 0103 physical sciences, EUV, Emission spectrum, SDG 7 - Affordable and Clean Energy, Main pulse, 010302 applied physics, business.industry, Energy conversion efficiency, 13.5 nm, Plasma light source, Pulse duration, Physics - Applied Physics, Plasma, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Laser, Physics - Plasma Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Plasma Physics (physics.plasm-ph), Wavelength, Laser-driven plasma, Extreme ultraviolet, Pre-pulse, 0210 nano-technology, business, Conversion efficiency
وصف الملف: application/pdf
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