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المؤلفون: R. Schulz, B. Wu, Keith Jenkins, D.S. Zicherman, Bijan Davari, Tak H. Ning, P.J. Coane, J.Y.-C. Sun, James D. Warnock, Denny D. Tang, Ghavam G. Shahidi, C.L. Chen, M. Rodriguez, M.R. Polcari, D. Klaus, P.A. McFarland, Yuan Taur, C.Y. Wong
المصدر: 1992 Symposium on VLSI Technology Digest of Technical Papers.
مصطلحات موضوعية: Materials science, Ion implantation, CMOS, business.industry, Shallow trench isolation, Electrical engineering, Optoelectronics, Ring oscillator, business, Lithography, NMOS logic, Electron-beam lithography, Common emitter
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::13c9b7e2694ecf1ee7d312e8a23b666b
https://doi.org/10.1109/vlsit.1992.200630 -
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المؤلفون: M.R. Polcari, Keith A. Jenkins, Y. T. Lii, D. Moy, J.J. Bucchignano, P.J. Coane, Shalom J. Wind, C.L. Chen, M.G.R. Thomson, David P. Klaus, M. G. Rosenfield, Y.J. Mii, Yuan Taur
المصدر: Proceedings of IEEE International Electron Devices Meeting.
مصطلحات موضوعية: Materials science, Fabrication, business.industry, Electrical engineering, Hardware_PERFORMANCEANDRELIABILITY, Integrated circuit, law.invention, Power (physics), Power supply voltage, Integrated injection logic, CMOS, law, Gate oxide, Hardware_INTEGRATEDCIRCUITS, business, Hardware_LOGICDESIGN
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2856a22fec5bd0e54c65ab341387d8ec
https://doi.org/10.1109/iedm.1993.347383 -
3
المؤلفون: P.J. Coane, Stephan A. Cohen, T.V. Rajeevakumar, T. Lii, Gary B. Bronner, Keith T. Kwietniak, P.A. McFarland, Z.A. Weinberg, Kenneth J. Stein, A.C. Megdanis
المصدر: International Electron Devices Meeting 1991 [Technical Digest].
مصطلحات موضوعية: Materials science, business.industry, Electrical engineering, Oxide, High density, Dielectric, Nitride, Capacitance, law.invention, Capacitor, chemistry.chemical_compound, chemistry, law, Trench, Optoelectronics, business, Dram
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::567d2259dda561b648b0d1222d769f48
https://doi.org/10.1109/iedm.1991.235295 -
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المؤلفون: K.N. Chiong, Denny D. Tang, F.J. Hohn, James D. Warnock, P.J. Coane, E. Petrillo, J.Y.-C. Sun, M.G.R. Thomson, John D. Cressler, N.J. Mazzeo, M.E. Rothwell, Keith A. Jenkins, A.E. Megdanis, Joachim N. Burghartz
المصدر: International Electron Devices Meeting 1991 [Technical Digest].
مصطلحات موضوعية: Materials science, Pass transistor logic, business.industry, Heterostructure-emitter bipolar transistor, Transistor, Electrical engineering, Hardware_PERFORMANCEANDRELIABILITY, Emitter-coupled logic, Resistor–transistor logic, law.invention, Integrated injection logic, law, Hardware_INTEGRATEDCIRCUITS, business, Lithography, Electron-beam lithography, Hardware_LOGICDESIGN
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c189c47b9e38b62d51cee334832ee9b7
https://doi.org/10.1109/iedm.1991.235267 -
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المؤلفون: T.J. Bucelot, H.H. Hansen, P.J. Coane, C.R. Blair, S. Pollack, B. Clark, P.A. Ronsheim, Bijan Davari, Ghavam G. Shahidi
المصدر: IEEE Electron Device Letters. 14:409-411
مصطلحات موضوعية: Materials science, Silicon, business.industry, Doping, Electrical engineering, chemistry.chemical_element, Electronic, Optical and Magnetic Materials, Ion implantation, chemistry, CMOS, Optoelectronics, Field-effect transistor, Electrical and Electronic Engineering, business, Boron, Indium, Communication channel
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المؤلفون: F.J. Hohn, N.J. Mazzeo, P.J. Coane, A.C. Megdanis, E. Petrillo, Keith Jenkins, M.G.R. Thomson, K.N. Chiong, M.E. Rothwell, James D. Warnock, J.Y.-C. Sun, John D. Cressler, Denny D. Tang, Joachim N. Burghartz
المصدر: IEEE Electron Device Letters. 13:262-264
مصطلحات موضوعية: Materials science, business.industry, Transistor, Doping, Electrical engineering, Cutoff frequency, Electronic, Optical and Magnetic Materials, law.invention, Ion implantation, law, Optoelectronics, Electrical and Electronic Engineering, business, Lithography, Electron-beam lithography, Electronic circuit, Common emitter
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7
المصدر: Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III.
مصطلحات موضوعية: Materials science, business.industry, law.invention, Metrology, Laser linewidth, Optics, Resist, law, X-ray lithography, Wafer, Photolithography, business, Lithography, Electron-beam lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bb41d52732969c066951cd7f98aece71
https://doi.org/10.1117/12.146522 -
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المؤلفون: Janos Kirz, David Sayre, P. J. Houzego, Malcolm R. Howells, P.J. Coane, John M. Kenney, P. Chang, Ralph Feder, Harvey Rarback, Dieter P. Kern
المصدر: Nuclear Instruments and Methods in Physics Research. 222:37-41
مصطلحات موضوعية: Materials science, Aperture, business.industry, General Engineering, Holography, Collimator, Zone plate, law.invention, Optics, Beamline, law, Microscopy, Focal length, business, Monochromator
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المؤلفون: Paul J. Rudeck, L. K. Wang, F. J. Hohn, P.J. Coane
المصدر: Microelectronic Engineering. 5:133-140
مصطلحات موضوعية: Materials science, business.industry, Nanotechnology, Hardware_PERFORMANCEANDRELIABILITY, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, CMOS, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Stencil lithography, X-ray lithography, Electrical and Electronic Engineering, Stepper, business, Lithography, Maskless lithography, Electron-beam lithography, Next-generation lithography
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المؤلفون: A. D. Wilson, P.J. Coane, F. J. Hohn, Paul J. Rudeck, T. H. Newman
المصدر: Microelectronic Engineering. 9:195-198
مصطلحات موضوعية: Very-large-scale integration, Computer science, Nanotechnology, Condensed Matter Physics, Chip, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, CMOS, Resist, law, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Electronics, Electrical and Electronic Engineering, Photolithography, Lithography, Electron-beam lithography