المؤلفون: Pascal Gouraud, Salma Younesy, Gilles Cunge, Sébastien Barnola, Camille Petit-Etienne

المساهمون: Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), STMicroelectronics [Crolles] (ST-CROLLES), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)

المصدر: Advanced Etch Technology for Nanopatterning IX
Advanced Etch Technology for Nanopatterning IX, Feb 2020, San Jose, United States. pp.30, ⟨10.1117/12.2549210⟩

مصطلحات موضوعية: 010302 applied physics, [PHYS]Physics [physics], Plasma etching, Materials science, business.industry, chemistry.chemical_element, BCL3, 02 engineering and technology, Plasma, 021001 nanoscience & nanotechnology, 7. Clean energy, 01 natural sciences, Ion, Indium tin oxide, chemistry, 0103 physical sciences, Optoelectronics, Inductively coupled plasma, 0210 nano-technology, business, Volatility (chemistry), Indium, ComputingMilieux_MISCELLANEOUS

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::76bb539a0f17ae1ab3048a9fe056c028
https://hal.univ-grenoble-alpes.fr/hal-02912746

المؤلفون: Q. Hubert, M. Mantelli, Y. Escarabajal, B. Duclaux, S. Audran, V. Arnal, Francois Maugain, Frederique Trenteseaux, E. Lepape, Abderrezak Marzaki, F. Baudin, Julien Delalleau, A. Champenois, D. Galpin, E. Beche, L. Baron, L. Parmigiani, Giada Ghezzi, Pascal Gouraud, F. La Rosa, Stephan Niel, Arnaud Regnier, B. Saidi, N. Cherault, T. Cabout

المصدر: 2018 IEEE International Electron Devices Meeting (IEDM)

مصطلحات موضوعية: 010302 applied physics, Class (computer programming), business.industry, Computer science, 020208 electrical & electronic engineering, Process (computing), 02 engineering and technology, 01 natural sciences, Term (time), Microcontroller, Memory cell, Embedded system, 0103 physical sciences, Trench, Process integration, 0202 electrical engineering, electronic engineering, information engineering, Architecture, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::447efcabc0f00c8688ad6ef70ad093bd

المؤلفون: Erwine Pargon, Onintza Ros, Marc Fouchier, Pascal Gouraud, Sébastien Barnola

المساهمون: Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])

المصدر: Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A, 2017, 35 (2), ⟨10.1116/1.4972228⟩
Journal of Vacuum Science and Technology A
Journal of Vacuum Science and Technology A, American Vacuum Society, 2017, 35 (2), ⟨10.1116/1.4972228⟩

مصطلحات موضوعية: Materials science, Gate dielectric, Silicon on insulator, Nanotechnology, 02 engineering and technology, Integrated circuit, 01 natural sciences, law.invention, law, Gate oxide, Etching (microfabrication), 0103 physical sciences, Lithography, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, [PHYS]Physics [physics], business.industry, Transistor, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Surfaces, Coatings and Films, Resist, Optoelectronics, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dad21ce3c37bc58d16ddc4aadd0a0ac9
https://hal.univ-grenoble-alpes.fr/hal-01891224

المؤلفون: Sébastien Barnola, Francois Leverd, Pierre Perreau, B. Orlando, Frederic Boeuf, D. Fleury, Gerard Ghibaudo, L. Clement, G. Bidal, Nicolas Loubet, Stephane Denorme, Remi Beneyton, Stephane Monfray, Thomas Skotnicki, A. Pouydebasque, Pascal Gouraud, J.-L. Huguenin, T. Salvetat

المصدر: Solid-State Electronics. 54:883-889

مصطلحات موضوعية: Engineering, Silicon, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 01 natural sciences, Parasitic capacitance, Stack (abstract data type), Ballistic conduction, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Materials Chemistry, Electronic engineering, Electrical and Electronic Engineering, High-κ dielectric, Electronic circuit, 010302 applied physics, business.industry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, chemistry, Current (fluid), 0210 nano-technology, business, Communication channel

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b15447fc322b8864d7c7380048d76eb6
https://doi.org/10.1016/j.sse.2010.04.029

المؤلفون: Loan Pham-Nguyen, Stephane Denorme, P. Gros, Pascal Gouraud, Pierre Perreau, Sébastien Barnola, Sebastien Haendler, A. Margain, Y. Campidelli, F. Boedt, Olivier Weber, Christian Arvet, Daniel Delprat, J. Vetier, Francois Leverd, Remi Beneyton, C. Fenouillet-Beranger, C. Perrot, Tomasz Skotnicki, Stephane Monfray, Bich-Yen Nguyen, O. Faynot, F. Baron, Konstantin Bourdelle, C. de Buttet, A. Torres, Francois Andrieu, L. Pinzelli, L. Tosti, C. Borowiak, C. Laviron, F. Abbate

المصدر: Solid-State Electronics. 54:849-854

مصطلحات موضوعية: Materials science, business.industry, Electrical engineering, Silicon on insulator, Condensed Matter Physics, Subthreshold slope, Electronic, Optical and Magnetic Materials, PMOS logic, Threshold voltage, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, business, Metal gate, NMOS logic, High-κ dielectric, Ground plane

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a64d2a50140eb30c48a51e6e373d86d6
https://doi.org/10.1016/j.sse.2010.04.009

المؤلفون: Remi Beneyton, Simon Deleonibus, Sebastien Haendler, Pascal Gouraud, E. Deloffre, Tomasz Skotnicki, Claire Fenouillet-Beranger, Sébastien Barnola, C. Laviron, X. Garros, L. Tosti, P. Perreau, Nicolas Loubet, M. Casse, T. Salvetat, C. Leyris, Francois Leverd, Mickael Gros-Jean, P. Scheiblin, Francois Andrieu, F. Allain, Stephane Denorme, Loan Pham-Nguyen, Roland Pantel, C. Buj, L. Clement, O. Faynot, M. Marin

المصدر: Solid-State Electronics. 53:730-734

مصطلحات موضوعية: Engineering, business.industry, Electrical engineering, Silicon on insulator, Integrated circuit, Condensed Matter Physics, Subthreshold slope, Noise (electronics), Electronic, Optical and Magnetic Materials, law.invention, law, Low-power electronics, MOSFET, Materials Chemistry, Optoelectronics, Static random-access memory, Electrical and Electronic Engineering, business, Metal gate, Ground plane, High-κ dielectric

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ecf6801aa16c5c0167c65a7890dfc8a8
https://doi.org/10.1016/j.sse.2009.02.009

المؤلفون: A. Vandooren, Francois Leverd, F. Pionnier, Sorin Cristoloveanu, Vincent Fiori, Roland Pantel, M. Broekaart, G. Imbert, Stephane Denorme, L. Gabette, Thomas Skotnicki, C. Chaton, Frederic Boeuf, F. Vigilant, S. Jullian, T. Kormann, C. Gallon, Claire Fenouillet-Beranger, Pascal Gouraud, C. Laviron, H. Bernard, Nicolas Loubet, Philippe Garnier, A. Tarnowka

المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Clot, Marielle

المصدر: Japanese Journal of Applied Physics
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2006, pp.Part1-45 Issue: 4B (2006) 3058-3063
Japanese Journal of Applied Physics, 2006, pp.Part1-45 Issue: 4B (2006) 3058-3063

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Silicon, General Physics and Astronomy, chemistry.chemical_element, Silicon on insulator, 02 engineering and technology, 01 natural sciences, law.invention, PMOS logic, Stress (mechanics), law, 0103 physical sciences, Ultimate tensile strength, ComputingMilieux_MISCELLANEOUS, NMOS logic, 010302 applied physics, business.industry, Transistor, General Engineering, 021001 nanoscience & nanotechnology, chemistry, Optoelectronics, Field-effect transistor, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a8667a54960a8a05e8ad984fd786da2b
https://doi.org/10.1143/jjap.45.3058

المؤلفون: L. Vishnubhotla, Pierre Morin, Robert Fox, S. Boret, R. Difrenza, B. Tavel, K. Rochereau, P. Stolk, C. Detcheverry, Daniel Gloria, M.T. Basso, M. Woo, M. Broekaart, B. Duriez, P. Garnier, D. Reber, Y. Trouille, J. Bienacel, M. Denais, D. Barge, C. Ortolland, K. Cooper, Frederic Boeuf, S. Vanbergue, Vincent Huard, Jean-Damien Chapon, J. Belledent, Pascal Gouraud, Nicolas Planes, Franck Arnaud, P. Abramowitz, E. Saboure, Y. Laplanche, C. Julien, M. Bidaud, M. Marin, Romain Gwoziecki

المصدر: Solid-State Electronics. 50:573-578

مصطلحات موضوعية: Engineering, business.industry, Transistor, Electrical engineering, Hardware_PERFORMANCEANDRELIABILITY, Ring oscillator, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, law.invention, CMOS, law, Low-power electronics, Dynamic demand, Hardware_INTEGRATEDCIRCUITS, Materials Chemistry, Electronic engineering, Power semiconductor device, Flicker noise, Electrical and Electronic Engineering, business, Low voltage, NMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2a1f438c93e06660abf827ae1f1027bf
https://doi.org/10.1016/j.sse.2006.03.030

المؤلفون: Alexandre Talbot, A. Toffoli, Simone Pokrant, D. Aime, Markus Muller, Alexandre Mondot, Yves Morand, G. Ribes, Francois Leverd, Thomas Skotnicki, Pascal Gouraud, Julien-Marc Roux, S. Descombes, Benoit Froment

المصدر: Solid-State Electronics. 50:620-625

مصطلحات موضوعية: Materials science, Silicon, business.industry, Transistor, chemistry.chemical_element, Nanotechnology, Hardware_PERFORMANCEANDRELIABILITY, Condensed Matter Physics, Epitaxy, Electronic, Optical and Magnetic Materials, PMOS logic, law.invention, Reliability (semiconductor), chemistry, law, Chemical-mechanical planarization, Hardware_INTEGRATEDCIRCUITS, Materials Chemistry, Miniaturization, Optoelectronics, Electrical and Electronic Engineering, business, Metal gate, Hardware_LOGICDESIGN

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0c6637d44991cb5c46cde16bf070c793
https://doi.org/10.1016/j.sse.2006.03.033

المؤلفون: B. Le-Gratiet, G. Druais, Denis Rideau, Marie-Anne Jaud, J.-D. Chapon, D. Hoguet, M. Mellier, L. Babaud, Clement Pribat, Emmanuel Josse, D. Barge, S. Puget, J. Mazurier, L. Grenouillet, Nicolas Loubet, S. Zoll, Thierry Poiroux, Jerome Simon, S.P. Fetterolf, M. Bidaud, S. Chhun, M. Vinet, Quanwei Liu, R. Bianchini, E. Bernard, J.-F. Kruck, X. Gerard, C. Gaumer, A. Pofelski, Francois Andrieu, Mustapha Rafik, Olivier Weber, N. Guillot, Pascal Gouraud, F. Abbate, O. Faynot, N. Degors, Olivier Gourhant, Antoine Cros, L. Parmigiani, E. Petitprez, J. Lacord, Patrick Scheer, C. Monget, Michel Haond, Evelyne Richard, P. Maury, Bruce B. Doris, M. Celik, Daniel Benoit, Frederic Monsieur, E. Baylac, L. Clément, S. Lagrasta, Magali Gregoire, J.-P. Manceau, S. Lasserre, P. Perreau, P. Brun, C. Gallon, V. Beugin, Remi Beneyton, Eric Perrin, S. Delmedico, R. Bingert

المصدر: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.

مصطلحات موضوعية: Very-large-scale integration, business.industry, Computer science, Transistor, Electrical engineering, law.invention, law, Logic gate, MOSFET, Dynamic demand, Electronic engineering, Static random-access memory, business, Electrical efficiency, Efficient energy use

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aedffd54e01f33ec4661fa88cc9e090c
https://doi.org/10.1109/vlsit.2014.6894343