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المؤلفون: Lena Wysocki, Lars Ratzmann, Patrick Schütt, Jörg Albers, Gunnar Wille, Shanshan Gu-Stoppel
المصدر: MOEMS and Miniaturized Systems XXII.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::51174043b1c7971275b0e344ea3c8512
https://doi.org/10.1117/12.2647807