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المؤلفون: Paul Hofemann, Vik Singh, Mahadevan GanapathiSubramanian, Fen Wan, Douglas J. Resnick, Se Hyun Ahn, Frank Y. Xu, Marlon Menezes, Jin Choi, Dwayne L. LaBrake, Sidlgata V. Sreenivasan, Shuqiang Yang, Michael I. Miller
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Consumables, business.industry, Nanotechnology, Semiconductor device, Polarizer, law.invention, Nanoimprint lithography, law, Flexible display, Etching (microfabrication), Transmittance, Optoelectronics, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::088d79e228163b634a523d55dfd82275
https://doi.org/10.1117/12.2048172 -
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المؤلفون: Paul Hellebrekers, Paul Hofemann, Ecron Thompson, Sidlgata V. Sreenivasan, Douglas J. Resnick, Dwayne L. LaBrake
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, Mechanical engineering, Overlay, Metrology, Resist, Chemical-mechanical planarization, Computer data storage, Patterned media, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Wafer, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9a1a10095f9e80eecbd297ea0b740d25
https://doi.org/10.1117/12.2029275