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المؤلفون: Heng Hu, Per Askebjer, Magnus Genrup, Narmin Hushmandi
المصدر: Volume 10B: Turbomachinery — Axial Flow Turbine Aerodynamics; Deposition, Erosion, Fouling, and Icing; Radial Turbomachinery Aerodynamics.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::120b6a04cabaf971b9f404a99c8cf383
https://doi.org/10.1115/gt2022-81908 -
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المؤلفون: Magnus Genrup, Per Askebjer, Narmin B. Hushmandi
المصدر: Volume 2C: Turbomachinery.
مصطلحات موضوعية: Materials science, Flow (mathematics), business.industry, Flow angle, Mechanics, Computational fluid dynamics, business, Axial turbine
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c28ed1c2d61bf15307fb622b39509384
https://doi.org/10.1115/gt2020-14605 -
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المؤلفون: Peter Björnängen, Dirk Rudloff, Michael Wagner, Per Askebjer, Michael Müller, Peter Dürr, Matthias List, Jan-Uwe Schmidt, Martin Friedrichs, Ulrike Dauderstädt
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Spatial light modulator, Fabrication, Materials science, business.industry, Laser, law.invention, Optics, law, Chemical-mechanical planarization, Photolithography, business, Actuator, Layer (electronics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a73b209a7bd59886318e9abae3a5a9f
https://doi.org/10.1117/12.810787 -
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المؤلفون: Thomas Ostrom, Tord Karlin, Mats Rosling, Jonas Måhlén, Per Carlqvist, Jesper Sallander, Per Askebjer, Andrzej Karawajczyk, Anders Österberg
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Spatial light modulator, Pixel, business.industry, law.invention, Optics, Optical proximity correction, law, Digital pattern generator, Distortion, Electronic engineering, Pattern matching, Photolithography, Photomask, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b77c38b36bce207541258c84a05baa34
https://doi.org/10.1117/12.686196 -
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المؤلفون: Ulric Ljungblad, Tor Sandstrom, Henrik Sjoeberg, Per Askebjer, Tord Karlin
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Engineering, Spatial light modulator, business.industry, Electrical engineering, Laser, Frame rate, law.invention, CMOS, law, Digital pattern generator, Electronic engineering, Node (circuits), Stepper, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::14c6983db57740578dd8b5ec0261c6be
https://doi.org/10.1117/12.590934 -
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المؤلفون: Jonathan Walford, Peter Hogfeldt, Mats Ekberg, Adisa Bajramovic, Robert Eklund, Thomas Ùstr÷m, Kezhao Xing, Hans Fosshaug, Per Askebjer, Johan Karlsson
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Spatial light modulator, Materials science, business.industry, Photoresist, Laser, law.invention, Laser linewidth, Optics, Resist, Digital pattern generator, law, Reticle, business, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::58c92b7af5a110b72105aa75c6ac1c5e
https://doi.org/10.1117/12.535821 -
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المؤلفون: Torbjoern Sandstrom, Hans Fosshaug, R Zerne, Mats Rosling, Allen M. Carroll, Andrzej Karawajczyk, Robert Eklund, Per Askebjer
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Spatial light modulator, business.industry, Linearity, Laser, law.invention, Wavelength, Optics, law, Digital pattern generator, Photomask, Photolithography, business, Coherence (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1a48507729f4381078cb8d181894efed
https://doi.org/10.1117/12.468622 -
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المصدر: 21st Annual BACUS Symposium on Photomask Technology.
مصطلحات موضوعية: Engineering, Spatial light modulator, business.industry, Image quality, Digital pattern generator, Feature (computer vision), ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Electronic engineering, Calibration, Photomask, business, Chip, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8934149e2344261e07899fcab862c258
https://doi.org/10.1117/12.458312 -
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المؤلفون: Lars Kjellberg, Steven Haddleton, Tomas Vikholm, Per Askebjer, Johan Larsson, Mans Bjuggren
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Laser printing, business.industry, Acousto-optics, Laser, law.invention, Lens (optics), Optics, Optical proximity correction, law, Digital pattern generator, Modulation, Photomask, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7599dd8e30728beedfe954fc891fa876
https://doi.org/10.1117/12.392080 -
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المؤلفون: Per Askebjer, Mans Bjuggren, Klas A. Edgren, Lars Kjellberg, Steven Haddleton, Per Liden, John-Oscar Larson, Tomas Vikholm
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, Laser, law.invention, Lens (optics), Optics, law, Digital pattern generator, Wafer, Photomask, Stepper, business, Lithography, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d0ccd57f0d0a9522dc867fb8873b60ae
https://doi.org/10.1117/12.373335