المؤلفون: Peter, Chu-Yeu, Lin, Liwei

المصدر: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :1382-1385 Jan, 2011

Relation: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)