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المؤلفون: Peter Björnängen, Dirk Rudloff, Michael Wagner, Per Askebjer, Michael Müller, Peter Dürr, Matthias List, Jan-Uwe Schmidt, Martin Friedrichs, Ulrike Dauderstädt
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Spatial light modulator, Fabrication, Materials science, business.industry, Laser, law.invention, Optics, law, Chemical-mechanical planarization, Photolithography, business, Actuator, Layer (electronics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a73b209a7bd59886318e9abae3a5a9f
https://doi.org/10.1117/12.810787