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1
المؤلفون: Wilfried Pletschen, Vadim Lebedev, N. Heidrich, R. E. Sah, Verena Zuerbig, Lutz Kirste, Oliver Ambacher, Christoph E. Nebel, Marco Wolfer, Jakob Hees
المصدر: Thin Solid Films. 558:267-271
مصطلحات موضوعية: Materials science, Fabrication, Bilayer, Metals and Alloys, Diamond, Heterojunction, Nanotechnology, Surfaces and Interfaces, engineering.material, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Membrane, Materials Chemistry, Unimorph, engineering, Thin film, Composite material, Layer (electronics)
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2
المؤلفون: Vadim Lebedev, Lutz Kirste, Oliver Ambacher, D. Iankov, R. E. Sah, Wilfried Pletschen, Verena Zuerbig, B. Raynor, Christoph E. Nebel, N. Heidrich
المصدر: Diamond and Related Materials. 38:69-72
مصطلحات موضوعية: Materials science, Cantilever, business.industry, Mechanical Engineering, Physics::Optics, Diamond, Nanotechnology, General Chemistry, Nitride, engineering.material, Focused ion beam, Piezoelectricity, Computer Science::Other, Electronic, Optical and Magnetic Materials, Stress (mechanics), Field electron emission, Materials Chemistry, Unimorph, engineering, Optoelectronics, Electrical and Electronic Engineering, business
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3
المؤلفون: Oliver Ambacher, Vladimir Polyakov, N. Heidrich, Steffen Leopold, Fabian Knöbber, Vadim Lebedev, R. E. Sah, S. Hampl, Volker Cimalla, Lutz Kirste, Wilfried Pletschen
المصدر: Sensors and Actuators A: Physical. 195:32-37
مصطلحات موضوعية: Microelectromechanical systems, Coupling, Materials science, Cantilever, business.industry, Aluminium nitride, Acoustics, Metals and Alloys, Structural engineering, Condensed Matter Physics, Piezoelectricity, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Vibration, chemistry.chemical_compound, Membrane, chemistry, Electrical and Electronic Engineering, business, Instrumentation, Energy harvesting
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4
المؤلفون: Oliver Ambacher, M. Baeumler, Jakob Hees, Vadim Lebedev, N. Heidrich, Verena Zürbig, Daniel Pätz, Steffen Leopold, Fabian Knöbber, R. E. Sah
المصدر: physica status solidi (a). 209:1835-1842
مصطلحات موضوعية: Materials science, Material properties of diamond, Diamond, Surfaces and Interfaces, engineering.material, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Characterization (materials science), Membrane, Carbon film, Sputtering, Residual stress, Materials Chemistry, engineering, Electrical and Electronic Engineering, Thin film, Composite material
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5
المؤلفون: Fabian Knöbber, Vadim Lebedev, Wilfried Pletschen, Volker Cimalla, Oliver Ambacher, N. Heidrich, R. E. Sah
المصدر: physica status solidi c. 9:403-406
مصطلحات موضوعية: Vibration, Stress (mechanics), Work (thermodynamics), Amplitude, Membrane, Materials science, Gas pressure, Composite material, Condensed Matter Physics, Material properties, Piezoelectricity
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6
المؤلفون: H. Baumann, Lutz Kirste, Volker Cimalla, V. Lebedev, M. Baeumler, H.-E. Zschau, P. Hiesinger, R. E. Sah
المساهمون: Publica
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:394-399
مصطلحات موضوعية: Materials science, Metallurgy, Surfaces and Interfaces, Temperature cycling, Substrate (electronics), Nitride, Sputter deposition, Condensed Matter Physics, Surfaces, Coatings and Films, Stress (mechanics), Sputtering, Residual stress, Composite material, Thin film
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7
المؤلفون: Wilfried Pletschen, R. E. Sah, Vadim Lebedev, N. Heidrich, Verena Zuerbig, Oliver Ambacher, Christoph E. Nebel, Jakob Hees, Lutz Kirste
المصدر: Diamond and Related Materials. 38:101-103
مصطلحات موضوعية: Microlens, Materials science, Mechanical Engineering, chemistry.chemical_element, Nanotechnology, General Chemistry, Nitride, Electronic, Optical and Magnetic Materials, Indium tin oxide, chemistry, Aluminium, Hall effect, Electrode, Materials Chemistry, Unimorph, Electrical and Electronic Engineering, Thin film
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8
المؤلفون: H. Baumann, R. E. Sah
المساهمون: Publica
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:545-550
مصطلحات موضوعية: inorganic chemicals, RBS-Untersuchung, Chemistry, Inorganic chemistry, Ion plating, Analytical chemistry, Surfaces and Interfaces, Chemical vapor deposition, Combustion chemical vapor deposition, equipment and supplies, Condensed Matter Physics, Electron beam physical vapor deposition, Surfaces, Coatings and Films, Pulsed laser deposition, SiON-Film, Plasma-enhanced chemical vapor deposition, NRA-Untersuchung, Deposition (phase transition), Thin film, ECR-PECVD
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9
المؤلفون: Kalpathy B. Sundaram, Ravi M. Todi, R. E. Sah, H. Baumann, K. Balachandran
المساهمون: Publica
المصدر: Microelectronic Engineering. 70:109-114
مصطلحات موضوعية: dielectric film, Plasma Abscheidung, RBS-Untersuchung, Chemistry, technology, industry, and agriculture, Analytical chemistry, Siliziumnitrid Dünnfilm, Chemical vapor deposition, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, silicon nitride film, chemistry.chemical_compound, Silicon nitride, RBS study, Plasma-enhanced chemical vapor deposition, Etching (microfabrication), Electrical and Electronic Engineering, Reactive-ion etching, Thin film, Buffered oxide etch, Phosphoric acid, dielektrische Schichten, plasma deposition
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10
المؤلفون: Vadim Lebedev, Oliver Ambacher, C.-C. Röhlig, R. E. Sah, Oliver A. Williams, O. Bludau, Steffen Leopold, Daniel Pätz, Fabian Knöbber, Volker Cimalla, Lutz Kirste
المصدر: physica status solidi c. 8:479-481
مصطلحات موضوعية: Materials science, business.industry, chemistry.chemical_element, Nanotechnology, Nitride, Condensed Matter Physics, Microstructure, Characterization (materials science), Membrane, chemistry, Aluminium, Piezoelectric mems, Optoelectronics, business, Material properties, Nanodiamond