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المؤلفون: Jiuning Hu, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jun Ye
المصدر: DTCO and Computational Patterning II.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ebe8f6dc12c5688febe4e5833d201c7e
https://doi.org/10.1117/12.2658649 -
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المؤلفون: ChangAn Wang, Yongfa Fan, Mu Feng, Qian Xie, Jazer Wang, Christopher Kaplan, Michael Crouse, Xiaoyang Li, Stephen Hsu, Peigen Cao, Yi-Hsing Peng, Stephen Chang, Jun Ye, Youping Zhang, Bin Cheng, Ken Yang, Leiwu Zheng, Jen-Shiang Wang, Austin Peng, Li-Hao Yeh, Cuiping Zhang, Rafael Howell, Alexander Tan, Yiqiong Zhao, Jun Lang, Xiaolong Zhang
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2fda8ba98471a8bbe07b4274712fec78
https://doi.org/10.1117/12.2658508 -
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المؤلفون: Stanley Chen, Alexander X. Gray, John C. Lam, Rafael Howell
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Optics, Materials science, Signal-to-noise ratio (imaging), business.industry, Instrumentation, Dispersion (optics), Detector, Transmittance, Photodetector, Repeatability, business, Intensity (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a67b79e41a063c962454151d0c4fe64
https://doi.org/10.1117/12.728949