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1دورية أكاديمية
المؤلفون: Xingshi Yu, Xia Chen, Milan M. Milosevic, Weihong Shen, Rob Topley, Bigeng Chen, Xingzhao Yan, Wei Cao, David J. Thomson, Shinichi Saito, Anna C. Peacock, Otto L. Muskens, Graham T. Reed
المصدر: Micromachines, Vol 13, Iss 2, p 291 (2022)
مصطلحات موضوعية: silicon photonics, optical waveguide, Ge ion implantation, annealing, wafer-scale testing, post-fabrication trimming, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource