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1دورية أكاديمية
المؤلفون: Robert Mroczyński, Grzegorz Głuszko, Romuald B. Beck, Andrzej Jakubowski, Michał Ćwil, Piotr Konarski, Patrick Hoffmann, Dieter Schmeißer
المصدر: Journal of Telecommunications and Information Technology, Iss 3 (2023)
مصطلحات موضوعية: ultra-thin dielectrics, silicon oxynitride, PECVD, CMOS, Telecommunication, TK5101-6720, Information technology, T58.5-58.64
وصف الملف: electronic resource
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2دورية أكاديمية
المؤلفون: Robert Mroczyński, Tomasz Bieniek, Romuald B. Beck, Michał Ćwil, Piotr Konarski, Patrick Hoffmann, Dieter Schmeißer
المصدر: Journal of Telecommunications and Information Technology, Iss 3 (2023)
مصطلحات موضوعية: ultra-thin dielectrics, oxynitride, SIMS, XPS, PECVD, Telecommunication, TK5101-6720, Information technology, T58.5-58.64
وصف الملف: electronic resource
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3دورية أكاديمية
المؤلفون: Mirosław Puźniak, Wojciech Gajewski, Aleksandra Seweryn, Marcin T. Klepka, Bartłomiej S. Witkowski, Marek Godlewski, Robert Mroczyński
المصدر: Materials, Vol 16, Iss 6, p 2539 (2023)
مصطلحات موضوعية: HfOxNy, MOS, HiPIMS, reactive magnetron sputtering, thermal stability, electrical parameters, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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4دورية أكاديمية
المؤلفون: Dario Schiavon, Robert Mroczyński, Anna Kafar, Grzegorz Kamler, Iryna Levchenko, Stephen Najda, Piotr Perlin
المصدر: Materials, Vol 14, Iss 23, p 7364 (2021)
مصطلحات موضوعية: gallium nitride, germanium doping, index of refraction, electron plasma, reflectometry, ellipsometry, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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5دورية أكاديمية
المؤلفون: Andrzej Mazurak, Robert Mroczyński, David Beke, Adam Gali
المصدر: Nanomaterials, Vol 10, Iss 12, p 2387 (2020)
مصطلحات موضوعية: silicon-carbide (SiC) nanocrystals, high-k dielectric, metal–insulator–semiconductor (MIS), metal–insulator–metal (MIM), electrical characterization, Chemistry, QD1-999
وصف الملف: electronic resource
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6دورية أكاديمية
المؤلفون: Robert Mroczyński, Daniel Iwanicki, Bartosz Fetliński, Monika Ożga, Michał Świniarski, Arkadiusz Gertych, Mariusz Zdrojek, Marek Godlewski
المصدر: Crystals, Vol 10, Iss 5, p 384 (2020)
مصطلحات موضوعية: aluminum (Al), Magnetron Sputtering, Taguchi orthogonal tables, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Crystallography, QD901-999
وصف الملف: electronic resource
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7دورية أكاديمية
المؤلفون: Mateusz Śmietana, Robert Mroczyński, Norbert Kwietniewski
المصدر: Materials, Vol 7, Iss 2, Pp 1249-1260 (2014)
مصطلحات موضوعية: silicon nitride (SiNx), optical properties, RF PECVD, process parameters, plasma activity, Taguchi’s method, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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8
المؤلفون: Piotr Perlin, Robert Mroczyński, Grzegorz Kamler, Iryna Levchenko, Dario Schiavon, Stephen P. Najda, Anna Kafar
المصدر: Materials; Volume 14; Issue 23; Pages: 7364
Materials, Vol 14, Iss 7364, p 7364 (2021)
Materialsمصطلحات موضوعية: Technology, Materials science, chemistry.chemical_element, Germanium, Gallium nitride, Article, chemistry.chemical_compound, Aluminium, Ellipsometry, Aluminium gallium nitride, General Materials Science, Wafer, index of refraction, Reflectometry, reflectometry, Microscopy, QC120-168.85, business.industry, QH201-278.5, Doping, electron plasma, Engineering (General). Civil engineering (General), TK1-9971, Descriptive and experimental mechanics, chemistry, germanium doping, Optoelectronics, Electrical engineering. Electronics. Nuclear engineering, TA1-2040, gallium nitride, business, ellipsometry
وصف الملف: application/pdf
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9
المؤلفون: Andrzej Mazurak, Robert Mroczyński
المصدر: Solid-State Electronics. 159:157-164
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Gate dielectric, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Capacitance, Voltage shift, Electronic, Optical and Magnetic Materials, Pulse (physics), Hardware_GENERAL, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, Current (fluid), 0210 nano-technology, business, Retention time, Voltage, High-κ dielectric
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10
المؤلفون: Krystyna Lawniczak-Jablonska, Robert Mroczyński, Sylwia Gieraltowska, Aleksandra Seweryn, Piotr Kuzmiuk, Marek Godlewski
المصدر: Materials
Volume 14
Issue 18
Materials, Vol 14, Iss 5395, p 5395 (2021)مصطلحات موضوعية: Technology, Materials science, Ozone, Relative permittivity, Dielectric, Article, chemistry.chemical_compound, Vacancy defect, General Materials Science, high-k dielectric, Thin film, High-κ dielectric, Microscopy, QC120-168.85, Dopant, biology, QH201-278.5, MIS, Engineering (General). Civil engineering (General), Hafnia, biology.organism_classification, TK1-9971, Descriptive and experimental mechanics, chemistry, Chemical engineering, ALD, Electrical engineering. Electronics. Nuclear engineering, TA1-2040, AFM
وصف الملف: application/pdf