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المؤلفون: J. Todeschini, B. Icard, S. Manakli, M. Jurdit, Laurent Pain, Blandine Minghetti, S. Leseuil, K. Docherty
المصدر: Japanese Journal of Applied Physics. 45:6462-6467
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Process (computing), General Physics and Astronomy, Linearity, Optics, Application-specific integrated circuit, Optical proximity correction, Line (geometry), Process window, business, Throughput (business), Algorithm, Energy (signal processing)
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المؤلفون: S. Manakli, K. Docherty, L. Pain, J. Todeschini, M. Jurdit, B. Icard, S. Leseuil, B. Minghetti
المصدر: Digest of Papers Microprocesses and Nanotechnology 2005.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e7807cbaf33d9e0dc16e302c7657103a
https://doi.org/10.1109/imnc.2005.203828 -
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