المؤلفون: Roman Antipenkov, M. Albrecht, S. Sebban, O. Finke, O. Hort, S. Reyne, Pavel Bakule, J. Nejdl, Zbyněk Hubka, František Batysta, J. Gautier, Robert Boge, V. E. Nefedova, T. Green, Fabio Giambruno, Fabio Frassetto, Luca Poletto, Jack A. Naylon, D. D. Mai

المصدر: Springer Proceedings in Physics ISBN: 9783030354527

مصطلحات موضوعية: Materials science, Optics, Beamline, law, business.industry, Infrared, Extreme ultraviolet, Harmonic, User oriented, Laser, business, Beam (structure), law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aa994d5543e9410cff973b0818078d84
https://doi.org/10.1007/978-3-030-35453-4_14

المؤلفون: O. Hort, M. Albrecht, V.E. Nefedova, O. Finke, D.D. Mai, S. Reyne, F. Giambruno, F, Frassetto, L. Poletto, J. Andreasson, J. Gautier, S. Sebban, J. Nejdl

المساهمون: Czech Academy of Sciences [Prague] (CAS), Czech Technical University in Prague (CTU), ARDOP Ind, NCR Inst Photon & Nanotechnol, Chalmers University of Technology [Göteborg], Laboratoire d'optique appliquée (LOA), École Nationale Supérieure de Techniques Avancées (ENSTA Paris)-École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Optics Express
Optics Express, Optical Society of America-OSA Publishing, 2019, 27 (6), pp.8871. ⟨10.1364/OE.27.008871⟩
Optics express 27 (2019): 8871–8883. doi:10.1364/OE.27.008871
info:cnr-pdr/source/autori:O. Hort, M. Albrecht, V.E. Nefedova, O. Finke, D.D. Mai, S. Reyne, F. Giambruno, F, Frassetto, L. Poletto, J. Andreasson, J. Gautier, S. Sebban, J. Nejdl/titolo:High-flux source of coherent XUV pulses for user applications/doi:10.1364%2FOE.27.008871/rivista:Optics express/anno:2019/pagina_da:8871/pagina_a:8883/intervallo_pagine:8871–8883/volume:27

مصطلحات موضوعية: DYNAMICS, 02 engineering and technology, Radiation, 01 natural sciences, high-order harmonics, law.invention, 010309 optics, Optics, law, 0103 physical sciences, High harmonic generation, Physics, Wavefront, GRATING MONOCHROMATOR, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Spectrometer, [PHYS.PHYS]Physics [physics]/Physics [physics], business.industry, ultrafast pulses, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Wavelength, Beamline, Extreme ultraviolet, 0210 nano-technology, business, GENERATION

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ae36e0ca9dd63382dd32d3db49924c4
https://pubmed.ncbi.nlm.nih.gov/31052698

المؤلفون: J. Nejdl, A. Wolf, Fabio Giambruno, V. Nefedova, S. Reyne, M. Le Pennec, A. Pacholski

المصدر: Scopus-Elsevier

مصطلحات موضوعية: Physics, Optics, Beamline, business.industry, Extreme ultraviolet, Harmonics, Broadband, Pillar, Turnkey, High harmonic generation, business, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd4f3d72122811ea794f5db3250d0cee

المؤلفون: Mickael Martin, C. Dupré, J. Foucher, Erwine Pargon, S. Reyne

المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'Énergie Atomique et aux Énergies Alternatives (CEA) - Grenoble-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), Clot, Marielle, Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

المصدر: SPIE 2008
SPIE 2008, 2008, San Jose, United States. pp.6922, ⟨10.1117/12.772675⟩
SPIE, advanced lithography
SPIE, advanced lithography, 2008, san jose, United States

مصطلحات موضوعية: Fabrication, Silicon, Computer science, Scanning electron microscope, 3D-AFM, chemistry.chemical_element, interaction, Nanotechnology, 02 engineering and technology, 01 natural sciences, Semiconductor industry, [SPI]Engineering Sciences [physics], 0103 physical sciences, Electronic engineering, Calibration, Process control, capabilities, Electronics, LWR, 010302 applied physics, accuracy, Atomic force microscopy, business.industry, Multiple applications, 021001 nanoscience & nanotechnology, tip wear, Metrology, CD, Semiconductor, chemistry, LER, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8c1c77d0f42b546c620d4482058c8d78
https://hal.archives-ouvertes.fr/hal-00384223/document

المؤلفون: Jean-Christophe Poncetta, L. Lamaignere, S. Reyne, M. Loiseau, H. Bercegol

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Photon, Pulse (signal processing), business.industry, Laser, law.invention, Wavelength, Optics, Impact crater, Laser damage, law, Optoelectronics, Growth rate, business, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::418b3e90b5ae4cbadcf31f3d6bc26c9b
https://doi.org/10.1117/12.753057

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