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المؤلفون: Patrice Gergaud, F. Deprat, Claire Fenouillet-Beranger, S. Favier, Fabrice Nemouchi, Ph. Rodriguez, Dominique Mangelinck, S. Zhiou, Ting Luo, C. Sese
المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), STMicroelectronics [Crolles] (ST-CROLLES), Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)
المصدر: Microelectronic Engineering
Microelectronic Engineering, 2018, 200, pp.19-25. ⟨10.1016/j.mee.2018.08.006⟩
Microelectronic Engineering, Elsevier, 2018, 200, pp.19-25. ⟨10.1016/j.mee.2018.08.006⟩مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, 02 engineering and technology, Substrate (electronics), 01 natural sciences, chemistry.chemical_compound, Phase (matter), 0103 physical sciences, Silicide, Thermal stability, Electrical and Electronic Engineering, Thin film, Sheet resistance, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Chemical engineering, 0210 nano-technology, Cobalt
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المؤلفون: Fabrice Nemouchi, Philippe Rodriguez, N. Coudurier, Christophe Jany, S. Zhiou, Salma bensalem, Bertrand Szelag, F. Boyer, E. Ghegin, Patrice Gergaud, Laura Toselli
المصدر: Japanese Journal of Applied Physics. 59:SL0801
مصطلحات موضوعية: 010302 applied physics, Materials science, Physics and Astronomy (miscellaneous), business.industry, General Engineering, General Physics and Astronomy, Laser, 01 natural sciences, Line (electrical engineering), law.invention, Surface preparation, law, 0103 physical sciences, Optoelectronics, Photonics, business, Ohmic contact, Cmos compatible
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المؤلفون: Patrice Gergaud, Laura Toselli, M. Pasquali, Christophe Jany, E. Ghegin, Ph. Rodriguez, Saddek Bensalem, S. Favier, Fabrice Nemouchi, Bertrand Szelag, S. Zhiou
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Solid-state, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, Copper, law.invention, chemistry, Surface preparation, law, Plating, 0103 physical sciences, Optoelectronics, Photonics, 0210 nano-technology, business, Cmos compatible
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bc98ae434d3886b785f11a4949430696
https://doi.org/10.1109/iitc.2018.8430397 -
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المؤلفون: Michael Texier, Khalid Hoummada, S. Zhiou, S. Rabhi, Carine Perrin-Pellegrino, M.C. Benoudia
المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Scripta Materialia
Scripta Materialia, Elsevier, 2017, 141, pp.28-31. ⟨10.1016/j.scriptamat.2017.07.011⟩
Scripta Materialia, 2017, 141, pp.28-31. ⟨10.1016/j.scriptamat.2017.07.011⟩مصطلحات موضوعية: 010302 applied physics, Diffraction, Self-diffusion, Materials science, Thermodynamic equilibrium, Mechanical Engineering, Kinetics, Metals and Alloys, Analytical chemistry, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Epitaxy, 01 natural sciences, Condensed Matter::Materials Science, Crystallography, Mechanics of Materials, Lattice (order), 0103 physical sciences, General Materials Science, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, High-resolution transmission electron microscopy
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المؤلفون: Marion Descoins, Alain Portavoce, Lee Chow, M. Bertoglio, R. Ma, S. Zhiou, Dario Narducci, J. Perrin Toinin, Khalid Hoummada
المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Shenzhen Univerisity [Shenzhen], Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Descoins, M, Perrin Toinin, J, Zhiou, S, Hoummada, K, Bertoglio, M, Ma, R, Chow, L, Narducci, D, Portavoce, A
المصدر: Scripta Materialia
Scripta Materialia, Elsevier, 2017, 139, pp.104-107. ⟨10.1016/j.scriptamat.2017.06.029⟩
Scripta Materialia, 2017, 139, pp.104-107. ⟨10.1016/j.scriptamat.2017.06.029⟩مصطلحات موضوعية: Fabrication, Materials science, Reaction, Analytical chemistry, chemistry.chemical_element, Nanotechnology, Germanium, 02 engineering and technology, 01 natural sciences, Selenium, Electrical resistivity and conductivity, Phase (matter), Contact, 0103 physical sciences, General Materials Science, Texture (crystalline), [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thin film, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, Mechanical Engineering, Doping, technology, industry, and agriculture, Metals and Alloys, 021001 nanoscience & nanotechnology, Condensed Matter Physics, CHIM/02 - CHIMICA FISICA, FIS/01 - FISICA SPERIMENTALE, chemistry, Mechanics of Materials, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Materials Science (all), 0210 nano-technology, Layer (electronics), Palladium
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المؤلفون: Tra Nguyen-Thanh, Nathalie Boudet, Patrice Gergaud, Laetitia Rapenne, Philippe Rodriguez, S. Zhiou, Nils Blanc, Fabrice Nemouchi
المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), CRG et Grands Instruments (CRG ), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), ANR-10-LABX-0055,MINOS Lab,Minatec Novel Devices Scaling Laboratory(2010), ANR-11-EQPX-0010,CRGF,Lignes synchrotron françaises à l'ESRF(2011), ANR-10-EQPX-0030,FDSOI11,Plateforme FDSOI pour le node 11nm(2010), ANR-10-LABX-0044,CEMAM,Center of Excellence in Multifunctional Architectured Materials(2010), CRG & Grands instruments (NEEL - CRG), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Journal of Applied Physics
Journal of Applied Physics, American Institute of Physics, 2016, 120 (13), pp.135304. ⟨10.1063/1.4963716⟩
Journal of Applied Physics, 2016, 120 (13), pp.135304. ⟨10.1063/1.4963716⟩مصطلحات موضوعية: 010302 applied physics, Materials science, Annealing (metallurgy), Intermetallic, General Physics and Astronomy, 02 engineering and technology, Crystal structure, 021001 nanoscience & nanotechnology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Crystallography, Reciprocal lattice, Lattice constant, 0103 physical sciences, X-ray crystallography, Scanning transmission electron microscopy, 0210 nano-technology, Stoichiometry
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المؤلفون: Philippe Maugis, Fabrice Nemouchi, Khalid Hoummada, Philippe Rodriguez, Patrice Gergaud, C. Perrin, S. Zhiou, E. Ghegin, Dominique Mangelinck
المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Applied Physics Letters
Applied Physics Letters, American Institute of Physics, 2016, 109 (13), ⟨10.1063/1.4963132⟩
Applied Physics Letters, 2016, 109 (13), ⟨10.1063/1.4963132⟩مصطلحات موضوعية: 010302 applied physics, Diffraction, Materials science, Physics and Astronomy (miscellaneous), Scanning electron microscope, Analytical chemistry, 02 engineering and technology, Atom probe, Substrate (electronics), 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Volume (thermodynamics), law, Phase (matter), 0103 physical sciences, Grain boundary, Thin film, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology
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المؤلفون: Fabrice Nemouchi, C. Perrin, Christophe Jany, Khalid Hoummada, János L. Lábár, S. Zhiou, Isabelle Sagnes, Ph. Rodriguez, E. Ghegin
المساهمون: Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Laboratoire de photonique et de nanostructures (LPN), Centre National de la Recherche Scientifique (CNRS), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
المصدر: 2016 IEEE Silicon Nanoelectronics Workshop (SNW)
2016 IEEE Silicon Nanoelectronics Workshop (SNW), Jun 2016, Honolulu, United States. ⟨10.1109/SNW.2016.7578056⟩مصطلحات موضوعية: 010302 applied physics, Very-large-scale integration, Materials science, Silicon photonics, Integrable system, business.industry, Metallurgy, Context (language use), 02 engineering and technology, 021001 nanoscience & nanotechnology, 7. Clean energy, 01 natural sciences, chemistry.chemical_compound, CMOS, chemistry, 0103 physical sciences, Indium phosphide, Photonics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8cc40ffad4251c60e593893983d4293b
https://hal-amu.archives-ouvertes.fr/hal-01436604 -
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المؤلفون: Fabrice Nemouchi, Laetitia Rapenne, S. Zhiou, Patrice Gergaud, Tra Nguyen-Thanh, Philippe Rodriguez
المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
المصدر: 2016 Ieee International Interconnect Technology Conference / Advanced Metallization Conference (Iitc/Amc)
2016 Ieee International Interconnect Technology Conference / Advanced Metallization Conference (Iitc/Amc), 2016, pp.136-138مصطلحات موضوعية: Materials science, Annealing (metallurgy), business.industry, 020209 energy, Transistor, Solid-state, Intermetallic, 02 engineering and technology, [CHIM.MATE]Chemical Sciences/Material chemistry, law.invention, CMOS, Electrical resistivity and conductivity, law, MOSFET, 0202 electrical engineering, electronic engineering, information engineering, Electronic engineering, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fee3ba73bb457137ba5deccc75178d9b
https://hal.archives-ouvertes.fr/hal-01456368 -
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المؤلفون: Jayanth Channagiri, S. Zhiou, Nathalie Boudet, Nils Blanc, Patrice Gergaud, Philippe Rodriguez, Fabrice Nemouchi
المصدر: Acta Crystallographica Section A Foundations and Advances. 73:C550-C550
مصطلحات موضوعية: Inorganic Chemistry, Reciprocal lattice, Materials science, Condensed matter physics, Structural Biology, General Materials Science, Crystallite, Physical and Theoretical Chemistry, Condensed Matter Physics, Biochemistry
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