المؤلفون: Ki-Vin Im, Sangyeoul Kang, Yunsu Kim, Han-jin Lim, Se-Hyoung Ahn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:01B131

مصطلحات موضوعية: 010302 applied physics, Reproducibility, Aspect ratio (aeronautics), Materials science, Nanotechnology, 02 engineering and technology, Surfaces and Interfaces, Semiconductor device, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Silane, Surfaces, Coatings and Films, chemistry.chemical_compound, Atomic layer deposition, chemistry, Chemical engineering, 0103 physical sciences, Deposition (phase transition), Thin film, 0210 nano-technology, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1ed6a8050f46685fba59e477fa193bfe
https://doi.org/10.1116/1.4972211