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المؤلفون: Ki-Vin Im, Sangyeoul Kang, Yunsu Kim, Han-jin Lim, Se-Hyoung Ahn
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:01B131
مصطلحات موضوعية: 010302 applied physics, Reproducibility, Aspect ratio (aeronautics), Materials science, Nanotechnology, 02 engineering and technology, Surfaces and Interfaces, Semiconductor device, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Silane, Surfaces, Coatings and Films, chemistry.chemical_compound, Atomic layer deposition, chemistry, Chemical engineering, 0103 physical sciences, Deposition (phase transition), Thin film, 0210 nano-technology, Layer (electronics)