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1
المؤلفون: Hsin-Kai Fang, Chin-Hsiu Huang, Zi-Qin Hong, Shang-Fu Tsai, Chen-Chien Li, Cheng-Yuan Li, Yan-Lin Li, Kuei-Shu Chang-Liao
المصدر: IEEE Transactions on Electron Devices. 68:4-9
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Gate dielectric, Oxide, Plasma, Dielectric, 01 natural sciences, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Reliability (semiconductor), chemistry, Logic gate, 0103 physical sciences, Optoelectronics, Electrical and Electronic Engineering, business, Leakage (electronics), High-κ dielectric
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2
المؤلفون: Chin-Hsiu Huang, Shang-Fu Tsai, Dun-Bao Ruan, Yi-Wen Hsu, Meng-Ying Yang, Hao-Ting Feng, Yan-Lin Li, Kuei-Shu Chang-Liao
المصدر: Microelectronic Engineering. 178:56-60
مصطلحات موضوعية: 010302 applied physics, Electron mobility, Materials science, Dopant, business.industry, Annealing (metallurgy), Gate dielectric, 02 engineering and technology, Dopant Activation, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Laser annealing, 0103 physical sciences, Thermal, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business, Microwave
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3
المؤلفون: Chin-Hsiu Huang, Yan-Lin Li, Wen-Fa Wu, Shang-Fu Tsai, Chao-Chen Ku, Kuei-Shu Chang-Liao, Yi-Wen Hsu, Dun-Bao Ruan, Meng-Ying Yang
المصدر: Microelectronic Engineering. 178:5-9
مصطلحات موضوعية: 010302 applied physics, Materials science, Analytical chemistry, Nanotechnology, Plasma treatment, 02 engineering and technology, Plasma, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Tetragonal crystal system, Subthreshold swing, 0103 physical sciences, Electrical and Electronic Engineering, 0210 nano-technology