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المؤلفون: Han Wah Ng, Shao Beng Law, Nicolai Petrov, Shinichiro Kakita, San Leong Liew, Jonathan Rullan, Seungman Choi
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: Materials science, business.industry, Physical vapor deposition, Plating, Chemical-mechanical planarization, Copper interconnect, Optoelectronics, Dielectric substrate, Dielectric, business, Electrochemistry, Line (electrical engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3d8dd3a7c54c8ad243e25e585c2065d1
https://doi.org/10.1109/iitc.2018.8430484 -
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المؤلفون: Martin O'Toole, James Hsueh-Chung Chen, Shreesh Narasimha, Jason Eugene Stephens, Shao Beng Law, Genevieve Beique, Ben Kim, Craig Child, E. Todd Ryan, Steven Leibiger, Louis J. Lanzerotti, Terry A. Spooner
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Optical engineering, Pillar, Nanotechnology, 01 natural sciences, Aspect ratio (image), Planarity testing, 010309 optics, Chemical-mechanical planarization, 0103 physical sciences, Multiple patterning, Optoelectronics, business, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4672fecbe6df4af021d44ffb253152cc
https://doi.org/10.1109/iitc-amc.2017.7968964 -
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المؤلفون: Edward Engbrecht, Junjing Bao, Philip L. Flaitz, Stephen M. Gates, Son Nguyen, A. Simon, Jihong Choi, Shao Beng Law, Eden Zielinski, Hosadurga Shobha, Dimitri R. Kioussis, Wei-Tsu Tseng, R. G. Filippi, Anthony D. Lisi, T. Lee, Tien-Jen Cheng, Naftali E. Lustig, Kaushik Chanda, Alfred Grill, Jason Gill
المصدر: 2010 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Permittivity, Materials science, business.industry, Bilayer, Analytical chemistry, chemistry.chemical_element, Time-dependent gate oxide breakdown, Plasma, Dielectric, Capacitance, Electromigration, Copper, chemistry, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::58862e215753873f6bcca49042c73522
https://doi.org/10.1109/iitc.2010.5510761