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1
المؤلفون: Yung-Hsiang Lin, Sheng-Yang Tseng, Phillip R. Atkins, Chi-Fu Yen, Li-Shiuan Tsai, Chun-Sheng Wu, Jan-Hau Chang, Hsien-Hung Chang, Shyh-Shii Pai, Chu-Han Chiu, Krishnan Shankar, Nick Chang, Lie-Quan Lee
المصدر: Metrology, Inspection, and Process Control for Microlithography XXXIII.
مصطلحات موضوعية: Diffraction, Physics, Wavelength, Optics, Wavelength range, business.industry, Ellipsometry, Maximum likelihood, Static random-access memory, business, Critical dimension, Weighting
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::eccb4ba65d78453f2e8a993ea89e9b54
https://doi.org/10.1117/12.2522826 -
2مؤتمر
المؤلفون: Atkins, Phillip R., Liequan Lee, Krishnan, Shankar, Chi-Fu Yen, Shyh-Shii Pai, Weihan Chang, Nick, Hsien-Hung Chang, Li-Shiuan Tsai, Sheng-Yang Tseng, Jan-Hau Chang, Yung-Hsiang Lin, Chu-Han Chiu, Chun-Sheng Wu
المصدر: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-6, 6p
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3
المؤلفون: Cheng-Chung Chi, Shyh-Shii Pai
المصدر: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.
مصطلحات موضوعية: Materials science, business.industry, Terahertz radiation, Bolometer, Physics::Optics, Laser, law.invention, Full width at half maximum, Amplitude, law, Optoelectronics, Dipole antenna, Atomic physics, business, Excitation, Electromagnetic pulse
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::eac0a0c1923c14085418a888433191f1
https://doi.org/10.1109/omems.2007.4373819 -
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المؤلفون: Shian-Wen Chang, Tai-Shen Wang, Shyh-Shii Pai
المصدر: Journal of Applied Physics. 109:053105
مصطلحات موضوعية: Electromagnetic field, Materials science, business.industry, Terahertz radiation, Surface plasmon, Physics::Optics, General Physics and Astronomy, Polarization (waves), Cutoff frequency, Optics, Surface wave, Waveform, Optoelectronics, business, Plasmon
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5مؤتمر
المؤلفون: Shyh-Shii Pai, Cheng-Chung Chi
المصدر: 2007 IEEE/LEOS International Conference on Optical MEMS & Nanophotonics; 2007, p19-20, 2p