المؤلفون: Bystrova, Svetlana N., Smits, Sander M., Klootwijk, Johan H., Wolters, Rob A. M., Kovalgin, Alexey Y., Nanver, Lis K., Schmitz, Jurriaan

المصدر: 2017 International Conference of Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2017 International Conference of. :1-6 Mar, 2017

Relation: 2017 International Conference of Microelectronic Test Structures (ICMTS)

المؤلفون: van Nieuwkasteele-Bystrova, Svetlana Nikolajevna, Smits, Sander M., Kovalgin, Alexey Y., Wolters, Robertus A.M., Nanver, Lis Karen, Schmitz, Jurriaan, Klootwijk, J.H.

المصدر: ISSUE=30;TITLE=30th International conference on Microelectronic Test Structures, ICMTS 2017

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::31bb0fd624d3c24bd64aec1029899d8b
https://research.utwente.nl/en/publications/84d8c984-3f41-48dc-a790-b88e83d2f4da

المؤلفون: Kaleli, B., Aarnink, Antonius A.I., Smits, Sander M., Hueting, Raymond Josephus Engelbart, Wolters, Robertus A.M., Schmitz, Jurriaan

المصدر: Proceeding of STW.ICT Conference 2010, 105-108
STARTPAGE=105;ENDPAGE=108;TITLE=Proceeding of STW.ICT Conference 2010

مصطلحات موضوعية: Silicon, IR-76309, METIS-275945, EWI-19751, FinFET, HSQ, PMMA, Electron Beam Lithography

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::40f65600e82c674eb4d2b4fd7c53d4cb
https://research.utwente.nl/en/publications/electron-beam-lithography-of-hsq-and-pmma-resists-and-importance-of-their-properties-to-link-the-nano-world-to-the-micro-world(d3c8ede2-1efc-481f-93d5-5a58fa6b93f3).html

المؤلفون: Melai, J., Salm, Cora, Smits, Sander M., Blanco Carballo, V.M., Schmitz, Jurriaan, Hageluken, Ben

المصدر: STARTPAGE=529;ENDPAGE=534;TITLE=10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

مصطلحات موضوعية: EWI-11740, IR-64581, outgassing, SC-RID: Radiation Imaging detectors, CMOS compatibility, wafer-scale post-processing, METIS-245947, dielectric strength, SU-8

وصف الملف: application/octet-stream; application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::3e5dc795f22c045f43d91c518c911267
https://research.utwente.nl/en/publications/considerations-on-using-su8-as-a-construction-material-for-high-aspect-ratio-structures(3d03b9bc-3eea-43d1-8ebe-4fc3f06b65b7).html

المؤلفون: Blanco Carballo, V.M., Salm, Cora, Smits, Sander M., Schmitz, Jurriaan, Melai, J., Chefdeville, M.A., van der Graaf, H.

المصدر: STARTPAGE=501;ENDPAGE=503;TITLE=10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

مصطلحات موضوعية: SC-RID: Radiation Imaging detectors, IR-62114, METIS-245937, EWI-11722

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::2897e2f457371f36cf9ae73a40ceaa9a
https://research.utwente.nl/en/publications/technological-aspects-of-gaseous-pixel-detectors-fabrication(0433c746-e0c9-4e11-9521-9fa3978e45c1).html

المؤلفون: Blanco Carballo, V.M., Salm, Cora, Smits, Sander M., Schmitz, Jurriaan, Chefdeville, M.A., van der Graaf, H., Timmermans, J., Visschers, J.L.

المصدر: Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 369-372
STARTPAGE=369;ENDPAGE=372;TITLE=Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006

مصطلحات موضوعية: Physics::Instrumentation and Detectors, SC-RID: Radiation Imaging detectors

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::acc78d4013632b0b8f3c7a49d4ba8f84
https://research.utwente.nl/en/publications/an-integrated-gaseous-detector-using-microfabrication-postprocessing-technology(9c0d58f9-b563-4b13-9851-9562bc5d9a6c).html

المؤلفون: Chefdeville, M., Chefdeville, M.A., Colas, P., Giomataris, Y., van der Graaf, H., Heijne, E.H.M., van der Putten, S., Salm, Cora, Schmitz, Jurriaan, Smits, Sander M., Timmermans, J., Visschers, J.L.

المصدر: ISSUE=8;STARTPAGE=139;ENDPAGE=142;TITLE=8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005

مصطلحات موضوعية: Physics::Instrumentation and Detectors, Microsensors, Wafer post-processing, integrated grid, IR-59596, Terms—Electron gas multiplication, microelectrodes, SC-CICC: Characterization of IC Components, Computer Science::Other, SU-8, MICROMEGAS, EWI-15513, wafer-scale integration, Computer Science::Distributed, Parallel, and Cluster Computing

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=narcis______::d331b1711f4316b24ab1c54a86e729e4
https://research.utwente.nl/en/publications/an-electronmultiplying-micromegas-grid-made-in-silicon-wafer-postprocessing-technology(5f817fd6-2538-4e72-a92a-66224798ac12).html

المؤلفون: Wang, Zhichun, Scarpa, A., Smits, Sander M., Kuper, F.G., Salm, Cora

المصدر: Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002, 127-130
STARTPAGE=127;ENDPAGE=130;TITLE=Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002
ISSUE=5;STARTPAGE=127;ENDPAGE=130;TITLE=5th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE 2002

مصطلحات موضوعية: METIS-207343, IR-67506, EWI-15603

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::4c381db77dd6e640176ce32830155230
https://research.utwente.nl/en/publications/temperature-effect-on-protection-diode-for-plasmaprocess-induced-charging-damage(15096f8f-49ee-400b-ad06-20bf2c928d52).html