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1
المؤلفون: Chii Wen Chen, Sou Gow Wuu, Yean-Kuen Fang, Mong-Song Liang, Kan Yuan Lee
المصدر: Thin Solid Films. 305:327-329
مصطلحات موضوعية: Materials science, Silicon, business.industry, Metals and Alloys, Oxide, chemistry.chemical_element, Surfaces and Interfaces, Plasma, Oxide thin-film transistor, Ion source, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Threshold voltage, Amorphous solid, chemistry.chemical_compound, chemistry, Thin-film transistor, Materials Chemistry, Optoelectronics, business
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2
المؤلفون: Sou Gow Wuu, Kou Chin Huang, Chii Wen Cheng, Yean-Kuen Fang, Kan Yuan Lee, Mong-Song Liang
المصدر: Japanese Journal of Applied Physics. 36:1025
مصطلحات موضوعية: Materials science, Hydrogen, Passivation, business.industry, Polysilicon depletion effect, General Engineering, Analytical chemistry, Oxide, General Physics and Astronomy, chemistry.chemical_element, Equivalent oxide thickness, chemistry.chemical_compound, chemistry, Gate oxide, Thin-film transistor, Optoelectronics, business, Plasma processing