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المؤلفون: John H. Zhang, Xie Ruilong, C. Labelle, Charan V. V. S. Surisetty, Pietro Montanini, Soon-Cheon Seo, Stan D. Tsai, Andrew M. Greene, Haigou Huang, Qiang Fang, Donald F. Canaperi, Wei-Tsu Tseng, Dinesh Koli, Walter Kleemeier, Dechao Guo, Jean E. Wynne, Matthew Malley, Raghuveer R. Patlolla
المصدر: MRS Advances. 2:2361-2372
مصطلحات موضوعية: Materials science, business.industry, 020209 energy, Mechanical Engineering, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Reduction (complexity), Mechanics of Materials, 0202 electrical engineering, electronic engineering, information engineering, General Materials Science, Chemical attack, Node (circuits), 0210 nano-technology, Process engineering, business
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المؤلفون: Charan V. V. S. Surisetty, Stan D. Tsai, Steven Bentley, C. Labelle, John H. Zhang, Raghuveer R. Patlolla, Walter Kleemeier, Jody A. Fronheiser, Shariq Siddiqui, Donald F. Canaperi
المصدر: MRS Advances. 2:2891-2902
مصطلحات موضوعية: Materials science, 020209 energy, Mechanical Engineering, Polishing, New materials, 02 engineering and technology, Condensed Matter Physics, Engineering physics, Reduction (complexity), Physical limitations, Overburden, CMOS, Mechanics of Materials, 0202 electrical engineering, electronic engineering, information engineering, General Materials Science, Critical dimension, Scaling
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المؤلفون: Ja-Hyung Han, Charan V. V. S. Surisetty, C. Labelle, H. P. Amanapu, Dinesh Koli, Stan D. Tsai, John H. Zhang, Kisup Chung, Haigou Huang, Ruilong Xie
المصدر: ECS Transactions. 77:169-177
مصطلحات موضوعية: Engineering, business.industry, Semiconductor device fabrication, Speech recognition, Node (networking), business, Computer network
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المؤلفون: Vimal Kamineni, Junli Wang, Susan Su Chen Fan, Andre Labonte, Ruilong Xie, Dinesh Gupta, Raja Muthinti, Juntao Li, Dechao Guo, Ryan Kevin J, B. Peethala, Richard Conte, Christopher Prindle, Veeraraghavan S. Basker, Shanti Pancharatnam, Kangguo Cheng, Albert M. Young, Stan D. Tsai, Huiming Bu, H. P. Amanapu, Chanro Park, Balasubramanian S. Haran, Robert R. Robison, Nicolas Loubet, Y. Liang, Huimei Zhou, Kisik Choi, Richard A. Conti, Andreas Knorr, Cave Nigel, Adra Carr, Saraf Iqbal Rashid, Andrew M. Greene, Michael P. Belyansky, Hao Tang, Mark Raymond
المصدر: 2019 Symposium on VLSI Technology.
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Oxide, chemistry.chemical_element, Nitride, Tungsten, chemistry.chemical_compound, chemistry, Process integration, Optoelectronics, Static random-access memory, Routing (electronic design automation), business, Scaling
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ddd686fefd2d3d87577b75e554a2b83f
https://doi.org/10.23919/vlsit.2019.8776492 -
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المؤلفون: Christian Lavoie, Curtis Durfee, Edward J. Nowak, Stan D. Tsai, Dechao Guo, W. Wang, Vimal Kamineni, Adra Carr, Gen Tsutsui, H. P. Amanapu, Jie Yang, Walter Kleemeier, Kisik Choi, Oleg Gluschenkov, Samuel S. Choi, Saraf Iqbal Rashid, Dinesh Gupta, F. Lie, Huiming Bu, Lan Yu, Andreas Knorr, Tenko Yamashita, Heng Wu, Zuoguang Liu, Christopher Prindle, Cave Nigel, Ryan Kevin J, Jay W. Strane, Kevin W. Brew, Chengyu Niu, Y. Liang, Balasubramanian S. Pranatharthi Haran, Mukesh Khare, Shogo Mochizuki, James J. Demarest
المصدر: 2018 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Contact resistance, Transistor, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Reduction (complexity), CMOS, law, Electrical resistivity and conductivity, 0103 physical sciences, Parasitic element, Optoelectronics, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::629135a0e9c0b7d3b8d1d85180cd8977
https://doi.org/10.1109/iedm.2018.8614661 -
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المؤلفون: Hemant Dixit, Mark Raymond, T. Abrams, Stan D. Tsai, Heng Wu, Ryan Kevin J, Vimal Kamineni, Praneet Adusumilli, H. P. Amanapu, Chengyu Niu, Jin Cho, R. Xiel, Y. Liang, Aniruddha Konar, X. Lin, Dechao Guo, Adra Carr, Samuel S. Choi, S. Fan, Nicholas A. Lanzillo, Kisik Choi, James J. Kelly
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Resistive touchscreen, Materials science, Condensed matter physics, business.industry, Contact resistance, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry.chemical_compound, Semiconductor, CMOS, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Trench, Silicide, 0210 nano-technology, business, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b522fcba3a28c6810f13d23be0ca4afc
https://doi.org/10.1109/iitc.2018.8454844 -
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المؤلفون: Balasubramanian S. Haran, Kisup Chung, Spyridon Skordas, Stan D. Tsai, Mark L. Lenhardt, Su Chen Fan, Sean Teehan, Alex Joseph Varghese, Ruilong Xie, Pietro Montanini
المصدر: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Materials science, Yield (engineering), Gas cluster ion beam, business.industry, Logic gate, Chemical-mechanical planarization, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Node (circuits), Wafer, Nitride, business, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8fbd27d6ee98fb8fd9dfb24709c5f9b4
https://doi.org/10.1109/asmc.2018.8373209 -
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المؤلفون: Yuanfang Lu, Wenyin Lu, Taifong Chao, Haigou Huang, Qiang Fang, Stan D. Tsai, Hong Jin Kim, John H. Zhang, Dinesh Koli
المصدر: 2018 China Semiconductor Technology International Conference (CSTIC).
مصطلحات موضوعية: CMOS, business.industry, Computer science, High selectivity, Slurry, Process improvement, Step height, Process control, Wafer, Process engineering, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d0f9ae687a094bfb21dd5a3c87f46a51
https://doi.org/10.1109/cstic.2018.8369258 -
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المؤلفون: Oleg Gluschenkov, Zuoguang Liu, Chengyu Niu, Andreas Knorr, Tenko Yamashita, Jay W. Strane, Mukesh Khare, Gen Tsutsui, Chris M. Prindle, Abraham Arceo, Indira Seshadri, Bruce Miao, A. Petrescu, Stan D. Tsai, Curtis Durfee, Soon-Cheon Seo, Adra Carr, Jie Yang, Walter Kleemeier, Kisik Choi, F. Lie, W. Wang, Rama Divakaruni, Chanro Park, Mark Raymond, Heng Wu, Huiming Bu, Dechao Guo, Anuja DeSilva, George Yang, Dinesh Gupta, Muthumanickam Sankarapandian, Praneet Adusumilli, Sam Choi, Kerem Akarvardar
المصدر: 2017 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: 010302 applied physics, Very-large-scale integration, Materials science, business.industry, Doping, Phase (waves), 02 engineering and technology, Ring oscillator, 021001 nanoscience & nanotechnology, Epitaxy, 01 natural sciences, Reduction (complexity), CMOS, Electrical resistivity and conductivity, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fafc4c9a45bd4b7e938db8bc086dead4
https://doi.org/10.1109/iedm.2017.8268440 -
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المؤلفون: Chun Wing Yeung, Raja Muthinti, Kangguo Cheng, Xin Miao, Miaomiao Wang, Tenko Yamashita, Hao Tang, Charan V. V. S. Surisetty, Stan D. Tsai, Son Nguyen, Jingyun Zhang, James Chingwei Li, Zuoguang Liu, Huiming Bu, Sanjay Mehta, Chanro Park, Rama Divakaruni
المصدر: 2016 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Transistor, Electrical engineering, 02 engineering and technology, Ring oscillator, Dielectric, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, law.invention, CMOS, Parasitic capacitance, law, Logic gate, 0103 physical sciences, Optoelectronics, Node (circuits), 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::34ce5381465b968b823de5e16070ffc7
https://doi.org/10.1109/iedm.2016.7838436