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المؤلفون: Martin Hofmann, Hans-Jörg Fecht, Ivo W. Rangelow, Mathias Holz, Markus Mohr, Stephan Mecholdt, Stefano Dallorto, Eberhard Manske
المصدر: Journal of Vacuum Science & Technology B. 37:061803
مصطلحات موضوعية: Fabrication, Materials science, Silicon, chemistry.chemical_element, 02 engineering and technology, engineering.material, 01 natural sciences, 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation, Lithography, Plasmon, 010302 applied physics, business.industry, Process Chemistry and Technology, Diamond, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Field electron emission, Nanoelectronics, chemistry, engineering, Optoelectronics, 0210 nano-technology, business, Scanning probe lithography
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المؤلفون: Daniel Staaks, Deirdre L. Olynick, XiaoMin Yang, Stefano Dallorto, Kim Yang Lee, Stefano Cabrini, Ivo W. Rangelow, Adam M. Schwartzberg
المصدر: Nanotechnology. 29(40)
مصطلحات موضوعية: Materials science, Silicon dioxide, Oxide, Bioengineering, 02 engineering and technology, 01 natural sciences, Nanoimprint lithography, law.invention, chemistry.chemical_compound, Atomic layer deposition, law, 0103 physical sciences, General Materials Science, Electrical and Electronic Engineering, Lithography, 010302 applied physics, business.industry, Mechanical Engineering, General Chemistry, 021001 nanoscience & nanotechnology, chemistry, Mechanics of Materials, Titanium dioxide, Multiple patterning, Optoelectronics, 0210 nano-technology, business, Layer (electronics)
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المؤلفون: Andy Goodyear, Martin Hofmann, Stefano Cabrini, Julia E. Szornel, Adam M. Schwartzberg, Stefano Dallorto, Ivo W. Rangelow, Monica Lorenzon, Mike Cooke
المصدر: Journal of Vacuum Science & Technology B. 37:051805
مصطلحات موضوعية: Materials science, Plasma parameters, 02 engineering and technology, Substrate (electronics), 01 natural sciences, Etching (microfabrication), 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, Silicon oxide, Instrumentation, 010302 applied physics, business.industry, Process Chemistry and Technology, fungi, technology, industry, and agriculture, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Chamber pressure, Electrode, Optoelectronics, Undercut, Inductively coupled plasma, 0210 nano-technology, business
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المؤلفون: Marco Lazzarino, Filippo Bencivenga, Alessandro Gessini, Emiliano Principi, R. Sergo, Stefano Dallorto, Deirdre L. Olynick, Alessia Matruglio, R. Mincigrucci, G. Kurdi, Simone Dal Zilio, Scott Dhuey, A. Simoncig, Laura Foglia, A. Calvi, Claudio Masciovecchio
المساهمون: Mincigrucci, Riccardo, Matruglio, Alessia, Calvi, Andrea, Foglia, Laura, Principi, Emiliano, Simoncig, Alberto, Bencivenga, Filippo, Dallorto, Stefano, Gessini, Alessandro, Kurdi, Gabor, Olynick, Deirdre, Dhuey, Scott, Sergo, Rudi, Lazzarino, Marco, Masciovecchio, Claudio, DAL ZILIO, Simone
المصدر: Optics letters 41 (2016): 5090–5093. doi:10.1364/OL.41.005090
info:cnr-pdr/source/autori:Mincigrucci, Riccardo; Matruglio, Alessia; Calvi, Andrea; Foglia, Laura; Principi, Emiliano; Simoncig, Alberto; Bencivenga, Filippo; Dallorto, Stefano; Gessini, Alessandro; Kurdi, Gabor; Olynick, Deirdre; Dhuey, Scott; Sergo, Rudi; Lazzarino, Marco; Masciovecchio, Claudio; Dal Zilio, Simone/titolo:Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses/doi:10.1364%2FOL.41.005090/rivista:Optics letters/anno:2016/pagina_da:5090/pagina_a:5093/intervallo_pagine:5090–5093/volume:41مصطلحات موضوعية: Novel technique, Free electron model, Atomic and Molecular Physics, and Optics, 02 engineering and technology, pump and probe, 01 natural sciences, Synchronization, law.invention, Superposition principle, Optics, law, 0103 physical sciences, 010306 general physics, Laser beams, Physics, detector, business.industry, wave overlap, 021001 nanoscience & nanotechnology, Laser, Sample (graphics), Atomic and Molecular Physics, and Optics, Characterization (materials science), Atomic and Molecular Physic, free-electron lasers, Physics::Accelerator Physics, Optoelectronics, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5532f75812f0b141ee26f1fc6949eda4
https://pubmed.ncbi.nlm.nih.gov/27805693 -
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المؤلفون: Christoph Kastl, Mike Cooke, Adam M. Schwartzberg, Ivo W. Rangelow, Stefano Dallorto, Craig Ward, Andy Goodyear, Julia E. Szornel, Stefano Cabrini
المصدر: Plasma Processes and Polymers. 16:1900051
مصطلحات موضوعية: 010302 applied physics, Materials science, Argon, Plasma etching, Polymers and Plastics, business.industry, Plasma parameters, technology, industry, and agriculture, chemistry.chemical_element, Substrate (electronics), Condensed Matter Physics, 01 natural sciences, chemistry, Etching (microfabrication), 0103 physical sciences, Electrode, Optoelectronics, Inductively coupled plasma, business, Layer (electronics)
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المؤلفون: Stefano Dallorto, Koichi Wago, XiaoMin Yang, Deirdre L. Olynick, Shuaigang Xiao, David S. Kuo, Kim Yang Lee, Michael R. Feldbaum, Jan-Ulrich Thiele, Philip L. Steiner, Yautzong Hsu, Yukiko Kubota, Zhaoning Yu, Tim Klemmer
المصدر: 2016 International Conference of Asian Union of Magnetics Societies (ICAUMS).
مصطلحات موضوعية: Materials science, Fabrication, Heat-assisted magnetic recording, business.industry, Etching (microfabrication), Nano, Optoelectronics, Area density, Thin film, business, Lithography, Servo
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1559eb62d7f055445a408387589621e7
https://doi.org/10.1109/icaums.2016.8479820 -
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المؤلفون: Angelica Chiodoni, Edvige Celasco, Candido Pirri, Adriano Sacco, D. Hidalgo, Valentina Alice Cauda, Simelys Hernández, Stefano Dallorto
مصطلحات موضوعية: Anatase, Materials science, Nanostructure, business.industry, Air treatment, Shell (structure), Water splitting, Optoelectronics, General Materials Science, Heterojunction, Photodegradation, business, Deposition (law)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f24610ef7d10ace6cbeb19222dad425c
http://hdl.handle.net/11567/757627 -
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المؤلفون: Steve Lenk, Claudia Lenk, N. Nikolov, Mathias Holz, Alexander Reum, Daniel Staaks, Zahid A. K. Durrani, Diana Nechepurenko, Elshad Guliyev, Deirdre L. Olynick, Stefano Dallorto, Marcus Kaestner, Tzvetan Ivanov, Dixi Liu, Ahmad Ahmad, Valentyn Ishchuk, Teodor Gotszalk, Tihomir Angelov, Mervyn Jones, Chen Wang, Martin Hofmann, Ivaylo Atanasov, Ivo W. Rangelow, Yana Krivoshapkina, Wojciech Majstrzyk, Burkhard E. Volland
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:06K202
مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Etching (microfabrication), 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, Reactive-ion etching, Instrumentation, Lithography, 010302 applied physics, business.industry, Process Chemistry and Technology, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Resist, Nanoelectronics, chemistry, Quantum dot, Optoelectronics, 0210 nano-technology, business, Scanning probe lithography
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9دورية أكاديميةAtomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features.
المؤلفون: Stefano Dallorto, Daniel Staaks, Adam Schwartzberg, XiaoMin Yang, Kim Y Lee, Ivo W Rangelow, Stefano Cabrini, Deirdre L Olynick
المصدر: Nanotechnology; 10/5/2018, Vol. 29 Issue 40, p1-1, 1p
مصطلحات موضوعية: TITANIUM dioxide, ATOMIC layer deposition
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