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1دورية أكاديمية
المؤلفون: Si Joon Kim, Jaidah Mohan, Harrison Sejoon Kim, Su Min Hwang, Namhun Kim, Yong Chan Jung, Akshay Sahota, Kihyun Kim, Hyun-Yong Yu, Pil-Ryung Cha, Chadwin D. Young, Rino Choi, Jinho Ahn, Jiyoung Kim
المصدر: Materials, Vol 13, Iss 13, p 2968 (2020)
مصطلحات موضوعية: atomic layer deposition, ferroelectric film, Hf0.5Zr0.5O2, low thermal budget process, TiN electrode, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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2دورية أكاديمية
المؤلفون: Yong Chan Jung, Su Min Hwang, Dan N. Le, Aswin L. N. Kondusamy, Jaidah Mohan, Sang Woo Kim, Jin Hyun Kim, Antonio T. Lucero, Arul Ravichandran, Harrison Sejoon Kim, Si Joon Kim, Rino Choi, Jinho Ahn, Daniel Alvarez, Jeff Spiegelman, Jiyoung Kim
المصدر: Materials, Vol 13, Iss 15, p 3387 (2020)
مصطلحات موضوعية: atomic layer deposition (ALD), aluminum nitride, hydrazine, trimethyl aluminum (TMA), Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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المؤلفون: Jaidah Mohan, Yong Chan Jung, Heber Hernandez-Arriaga, Jin-Hyun Kim, Takashi Onaya, Akshay Sahota, Su Min Hwang, Dan N. Le, Jiyoung Kim, Si Joon Kim
المصدر: ACS Applied Electronic Materials. 4:1405-1414
مصطلحات موضوعية: Materials Chemistry, Electrochemistry, Electronic, Optical and Magnetic Materials
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المؤلفون: Dan N. Le, Su Min Hwang, Jihoon Woo, Seungsoo Choi, Taehee Park, Jean-Francois Veyan, Nikhil M. Tiwale, Ashwanth Subramanian, Won-Il Lee, Chang-Yong Nam, Rino Choi, Jiyoung Kim
المصدر: International Conference on Extreme Ultraviolet Lithography 2022.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ac29c46cfe1126a19133bb0c932960a5
https://doi.org/10.1117/12.2641647 -
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المؤلفون: Won-Il Lee, Ashwanth Subramanian, Nikhil M. Tiwale, Dan N. Le, Su Min Hwang, Jiyoung Kim, Chang-Yong Nam
المصدر: International Conference on Extreme Ultraviolet Lithography 2022.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::48236dccac0716820eb43469fd1ba586
https://doi.org/10.1117/12.2641794 -
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المؤلفون: Dan N. Le, Jinho Ahn, Byung Keun Hwang, Xiaobing Zhou, Lance Lee, Yong Chan Jung, Jiyoung Kim, Harrison Sejoon Kim, Akshay Sahota, Arul Vigneswar Ravichandran, Si Joon Kim, Jaebeom Lee, Su Min Hwang
المصدر: ACS Applied Nano Materials. 4:2558-2564
مصطلحات موضوعية: Materials science, business.industry, Plasma, engineering.material, chemistry.chemical_compound, Atomic layer deposition, Silicon nitride, chemistry, Coating, engineering, Optoelectronics, General Materials Science, Nanometre, business
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المؤلفون: Yeon-bin Lee, Su-min Hwang, Igil Kim
المصدر: Journal of Digital Contents Society. 21:1113-1122
مصطلحات موضوعية: Design stage, Computer science, Human–computer interaction, Digital human, Virtual reality, Social relation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2cd28f63eaf32f4acf81dc847c67f46b
https://doi.org/10.9728/dcs.2020.21.6.1113 -
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المؤلفون: Yong Chan Jung, Xiaobing Zhou, Xin Meng, Arul Vigneswar Ravichandran, Harrison Sejoon Kim, Jinho Ahn, Si Joon Kim, Young-Chul Byun, Byung Keun Hwang, Su Min Hwang, Akshay Sahota, Jiyoung Kim, Lance Lee
المصدر: Journal of Materials Chemistry C. 8:13033-13039
مصطلحات موضوعية: 010302 applied physics, Materials science, Chemical polarity, 02 engineering and technology, General Chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, Silane, Cathode, law.invention, chemistry.chemical_compound, Atomic layer deposition, chemistry, Chemical engineering, Silicon nitride, law, 0103 physical sciences, Materials Chemistry, Molecule, Thin film, 0210 nano-technology, Deposition (law)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d76b98a0a36945baa9460769f3e92ca1
https://doi.org/10.1039/d0tc02866e -
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المؤلفون: Yeon-bin Lee, Han, Jungyeob, Lee, Haeun, Yun Gery, Su-min Hwang
المصدر: Journal of Korea Intitute of Spatial Design. 14:487-496
مصطلحات موضوعية: business.industry, Computer science, Production (economics), High resolution, Artificial intelligence, business, Style (sociolinguistics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f6ea34aebf9097805972e798a3dcbc27
https://doi.org/10.35216/kisd.2019.14.7.487 -
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المؤلفون: Aditya Raja Gummadavelly, Chang-Yong Nam, Nikhill M. Tiwale, Jiyoung Kim, Jean François Veyan, Su Min Hwang, Dan N. Le, Jinho Ahn, Yong Chan Jung
المصدر: International Conference on Extreme Ultraviolet Lithography 2021.
مصطلحات موضوعية: Materials science, Resist, Extreme ultraviolet lithography, technology, industry, and agriculture, Electron beam processing, Electron, Fourier transform infrared spectroscopy, Absorption (electromagnetic radiation), Photochemistry, Hybrid material, Electron gun
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::98e9528deb5d8a5e7392a85f0dffa072
https://doi.org/10.1117/12.2601033