المؤلفون: Chi-Hoon Lee, Nak-Jin Son, Sun-Cheol Hong, Seung-Moo Lee, Dong-Gun Park, Won-Hee Jang, Tae-Hyun An, Wonshik Lee

المصدر: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) Semiconductor device research Semiconductor Device Research Symposium, 2001 International. :38-41 2001

Relation: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings

المؤلفون: Donggun Park, Nak-Jin Son, Seung-Moo Lee, Sun-Cheol Hong, Won-Hee Jang, Chihoon Lee, Wonshik Lee, Tae-Hyun An

المصدر: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497).

مصطلحات موضوعية: Fabrication, Materials science, business.industry, Electrical engineering, law.invention, Arc (geometry), Anti-reflective coating, law, Gigabit, Optoelectronics, Photolithography, business, Lithography, Deposition (law), Dram

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d7d78be980afbc9f53d5c946e8ce2f4d
https://doi.org/10.1109/isdrs.2001.984433

المؤلفون: Chi-Hoon Lee, Nak-Jin Son, Sun-Cheol Hong, Seung-Moo Lee, Dong-Gun Park, Won-Hee Jang, Tae-Hyun An, Wonshik Lee

المصدر: 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497); 2001, p38-41, 4p