المؤلفون: Sebastien Sollier, Julie Widiez, Gweltaz Gaudin, Frederic Mazen, Thierry Baron, Mickail Martin, Marie-Christine Roure, Pascal Besson, Christophe Morales, Elodie Beche, Frank Fournel, Sylvie Favier, Amelie Salaun, Patrice Gergaud, Maryline Cordeau, Christellle Veytizou, Ludovic Ecarnot, Daniel Delprat, Ionut Radu, Thomas Signamarcheix

المصدر: Journal of Low Power Electronics and Applications, Vol 6, Iss 4, p 19 (2016)

مصطلحات موضوعية: InGaAs, Smart CutTM, direct bonding, thin layer transfer, Al2O3, Applications of electric power, TK4001-4102

وصف الملف: electronic resource

Relation: http://www.mdpi.com/2079-9268/6/4/19; https://doaj.org/toc/2079-9268

URL الوصول: https://doaj.org/article/ffe38044688c423db103fb20f61af151

المؤلفون: Sylvie Favier

المصدر: Innovations & Thérapeutiques en Oncologie. 9:27-30

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4ddf9d2fad898bf4e92785a8f6eed12f
https://doi.org/10.1684/ito.2023.0359

المؤلفون: Christine Morin, Yann Mazel, Jean-Philippe Michel, Sylvie Favier, Claudiu V. Falub, Sandrine Perraudeau, Rachid Hida, Zineb Saghi

المصدر: Journal of Magnetism and Magnetic Materials. 453:211-219

مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Magnetostriction, 02 engineering and technology, Substrate (electronics), Coercivity, Sputter deposition, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Rutherford backscattering spectrometry, 01 natural sciences, Electronic, Optical and Magnetic Materials, Condensed Matter::Materials Science, Sputtering, 0103 physical sciences, Optoelectronics, Thin film, 0210 nano-technology, Anisotropy, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::32e334601aa25b6560c365b81874b010
https://doi.org/10.1016/j.jmmm.2018.01.022

المؤلفون: B.-N. Bozon, J.-Ph. Reynard, Y. Le Friec, Sylvie Favier, Yann Mazel, K. Dabertrand, Patrice Gergaud, R. Famulok, Ph. Rodriguez, Fabrice Nemouchi, C. Jahan, Bernard Previtali, F. Boyer

المساهمون: Département Intégration Hétérogène sur Silicium (DIHS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA), STMicroelectronics, Applied Materials France, ANR-11-EQPX-0010,CRGF,Lignes synchrotron françaises à l'ESRF(2011), ANR-10-EQPX-0030,FDSOI11,Plateforme FDSOI pour le node 11nm(2010), ANR-10-AIRT-0005,NANOELEC,NANOELEC(2010), ANR: ANR-10-AIRT-05,Programme Investissements d’Avenir

المصدر: Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing, 2017, 71, pp.433-440. ⟨10.1016/j.mssp.2017.08.033⟩
Materials Science in Semiconductor Processing, Elsevier, 2017, 71, pp.433-440. ⟨10.1016/j.mssp.2017.08.033⟩

مصطلحات موضوعية: Materials science, Interconnects, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, Substrate (electronics), Tungsten, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Atomic layer deposition, Plasma-enhanced chemical vapor deposition, Low resistance, Contact, 0103 physical sciences, General Materials Science, Thin film, Composite material, 010302 applied physics, Mechanical Engineering, 021001 nanoscience & nanotechnology, Condensed Matter Physics, [SPI.TRON]Engineering Sciences [physics]/Electronics, X-ray reflectivity, Tungsten film, chemistry, Mechanics of Materials, PCRAM, Liner, 0210 nano-technology, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::92b6f3a32feea7f719e44744e05d4fc6
https://doi.org/10.1016/j.mssp.2017.08.033

المؤلفون: Sophie Bernasconi, David Cooper, Jean-Francois Damlencourt, Yves Morand, Fabrice Nemouchi, Sylvie Favier, Jean-Michel Hartmann, Veronique Carron

المصدر: ECS Transactions. 58:239-248

مصطلحات موضوعية: Engineering, Engineering drawing, Strain engineering, business.industry, business, Engineering physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c04414bbd663a5945ccb202753ab900d
https://doi.org/10.1149/05809.0239ecst

المؤلفون: Thierry Baron, Pascal Besson, Mickail Martin, Christophe Morales, Sebastien Sollier, Maryline Cordeau, Ionut Radu, Amelie Salaun, Thomas Signamarcheix, Ludovic Ecarnot, Marie-Christine Roure, Elodie Beche, Daniel Delprat, Christellle Veytizou, Gweltaz Gaudin, Sylvie Favier, Frank Fournel, Frédéric Mazen, Julie Widiez, Patrice Gergaud

المصدر: Journal of Low Power Electronics and Applications; Volume 6; Issue 4; Pages: 19
Journal of Low Power Electronics and Applications, Vol 6, Iss 4, p 19 (2016)

مصطلحات موضوعية: Materials science, Fabrication, InGaAs, Wafer bonding, Insulator (electricity), 02 engineering and technology, Direct bonding, Epitaxy, 01 natural sciences, Smart CutTM, 0103 physical sciences, Al2O3, Surface roughness, Electronic engineering, Wafer, direct bonding, thin layer transfer, Electrical and Electronic Engineering, 010302 applied physics, Atomic force microscopy, business.industry, lcsh:Applications of electric power, lcsh:TK4001-4102, 021001 nanoscience & nanotechnology, Optoelectronics, 0210 nano-technology, business

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f2d50e306cf5c094c92c62ff9d8ecf1

المؤلفون: Gweltaz Gaudin, Jean-Sébastien Moulet, Florence Madeira, Helen Grampeix, Frédéric Mazen, Thierry Baron, Sébastien Sollier, Mickael Martin, R. Alcotte, Elodie Beche, Christelle Veytizou, Amélie Salaun, Sylvie Favier, Julie Widiez

المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Matériaux, ingénierie et science [Villeurbanne] (MATEIS), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)

المصدر: Japanese Journal of Applied Physics
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2016, 55 (4S), pp.04EB10. ⟨10.7567/JJAP.55.04EB10⟩
Japanese Journal of Applied Physics, 2016, 55 (4S), pp.04EB10. ⟨10.7567/JJAP.55.04EB10⟩

مصطلحات موضوعية: 010302 applied physics, [PHYS]Physics [physics], Materials science, business.industry, Wafer bonding, General Engineering, Oxide, General Physics and Astronomy, Insulator (electricity), 02 engineering and technology, 021001 nanoscience & nanotechnology, Epitaxy, 01 natural sciences, chemistry.chemical_compound, Outgassing, chemistry, 0103 physical sciences, Thermal, Indium phosphide, Optoelectronics, Wafer, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::38e6b056dd8450caa734a0f0800324cf
https://hal.univ-grenoble-alpes.fr/hal-01991862

المؤلفون: Mickael Martin, Ludovic Ecarnot, Pascal Besson, Daniel Delprat, M. C. Roure, Christelle Veytizou, A. Salaun, Christophe Morales, Thierry Baron, E. Beche, Frank Fournel, M. Cordeau, Patrice Gergaud, T. Signamarcheix, Iuliana Radu, Frédéric Mazen, Sylvie Favier, Julie Widiez, Gweltaz Gaudin, S. Sollier

المصدر: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

مصطلحات موضوعية: Materials science, Fabrication, business.industry, Wafer bonding, Surface roughness, Optoelectronics, Insulator (electricity), Direct bonding, business, Epitaxy, Smart Cut

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4eb1a532556e2aff0d50503dc51ff2ff
https://doi.org/10.1109/s3s.2015.7333495

المؤلفون: M. Martin, E. Beche, C. Veytizou, S. Sollier, G. Gaudin, S. Arnaud, S. David, D. Delprat, A. Salaun, T. Baron, T. Signamarcheix, J. Widiez, Frederic Mazen, F. Madeira, Sylvie Favier, Helen Grampeix

المصدر: Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, business.industry, Optoelectronics, Insulator (electricity), business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::228302747c05ff27c2345cbb847aae52
https://doi.org/10.7567/ssdm.2015.n-5-3

المؤلفون: Sophie Bodnar, Sylvie Favier, Emmanuel Nolot, Joel Dufourcq

المصدر: Materials Research Society Symposium Proceedings.

مصطلحات موضوعية: Laser scattering, Optics, Materials science, business.industry, Quantum dot, Scientific method, Optoelectronics, business, Characterization (materials science), Line (formation)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b87e9b079380a7a992203b9317dac96a
https://doi.org/10.1557/proc-1117-j03-05