المؤلفون: Haigou Huang, Taifong Chao, Ja-Hyung Han, Koli, Dinesh, Qiang Fang

المصدر: 2017 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2017 China. :1-4 Mar, 2017

Relation: 2017 China Semiconductor Technology International Conference (CSTIC)

المؤلفون: Yuanfang Lu, Wenyin Lu, Taifong Chao, Haigou Huang, Qiang Fang, Stan D. Tsai, Hong Jin Kim, John H. Zhang, Dinesh Koli

المصدر: 2018 China Semiconductor Technology International Conference (CSTIC).

مصطلحات موضوعية: CMOS, business.industry, Computer science, High selectivity, Slurry, Process improvement, Step height, Process control, Wafer, Process engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d0f9ae687a094bfb21dd5a3c87f46a51
https://doi.org/10.1109/cstic.2018.8369258

المؤلفون: Ja-Hyung Han, Taifong Chao, Qiang Fang, Dinesh Koli, Haigou Huang

المصدر: 2017 China Semiconductor Technology International Conference (CSTIC).

مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Nanotechnology, One-Step, 02 engineering and technology, 021001 nanoscience & nanotechnology, Chip, 01 natural sciences, Transmission electron microscopy, Chemical-mechanical planarization, 0103 physical sciences, Microscopy, Slurry, Optoelectronics, Wafer, Process window, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a5bd4df70776b3fab3752078668c8f62
https://doi.org/10.1109/cstic.2017.7919826