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المؤلفون: Naoki Morita, Takahisa Kikuchi, Shigeru Eto, Ayako Sugimoto, Akira Okutomi
المصدر: Optical Microlithography XXXIII.
مصطلحات موضوعية: Scanner, Measure (data warehouse), Matching (statistics), Semiconductor device fabrication, business.industry, Computer science, Sampling (statistics), Overlay, Grid, business, Throughput (business), Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6e1d652c429ea5eb0d813a5656e827dd
https://doi.org/10.1117/12.2551973 -
2
المؤلفون: Yohei Takase, Yukio Koizumi, Susumu Isago, Hironori Ikezawa, Takahisa Kikuchi, Satoshi Ishiyama, Toshiharu Nakashima, Minoru Onda, Yasuhiro Kitamura, Daisuke Inoue, Hidetaka Kawahara, Yasuhiro Ohmura, Akimasa Nagahiro, Hasegawa Keisuke, Tsuge Yosuke, Toru Hirayama
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Leading edge, Materials science, business.industry, 02 engineering and technology, Edge (geometry), 021001 nanoscience & nanotechnology, 01 natural sciences, Deformable mirror, law.invention, 010309 optics, Lens (optics), Optics, law, Control system, 0103 physical sciences, Photolithography, 0210 nano-technology, business, Throughput (business), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::facf50de45c7da0f53912ae2804f4cd6
https://doi.org/10.1117/12.2218840 -
3
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Autofocus, Scanner, Computer science, business.industry, law.invention, Lens (optics), law, Computer graphics (images), Immersion (virtual reality), Miniaturization, Wafer, business, Lithography, Immersion lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6764baa94c85bfec388532397e4fa262
https://doi.org/10.1117/12.2011123 -
4
المؤلفون: Park Hongki, Takahisa Kikuchi, Nobuyuki Takahashi, Shinji Wakamoto, Akiko Mori, Katsushi Makino, Satoru Sasamoto
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, business.industry, Computer science, Distortion (optics), Embedded system, Immersion (virtual reality), Wafer, Overlay, business, Grid, Lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1169a2d3587df3c2f4bee05d0001e97
https://doi.org/10.1117/12.2010875 -
5
المؤلفون: Chihaya Motoyoshi, Katsushi Makino, Yuji Shiba, Hajime Yamamoto, Yuuki Ishii, Yasuhiro Morita, Jin Udagawa, Takahisa Kikuchi, Yosuke Shirata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Semiconductor device fabrication, business.industry, Computer science, Node (networking), Immersion (virtual reality), Multiple patterning, Optoelectronics, Overlay, business, Telecommunications, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::563463dc245a1d8201ca7054bdfd62fc
https://doi.org/10.1117/12.916246 -
6
المؤلفون: Yuuji Shiba, Shinji Wakamoto, Masahiko Yasuda, Yosuke Shirata, Takahisa Kikuchi, Shinya Takubo, Yuuki Ishii, Hiroto Imagawa
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Interferometry, Scanner, Computer science, business.industry, Calibration, Astronomical interferometer, Multiple patterning, Overlay, business, Throughput (business), Encoder, Computer hardware, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::46a7b8809f9d21b26f3941cb7ed42072
https://doi.org/10.1117/12.879291 -
7
المؤلفون: Yuuki Ishii, Ryo Tanaka, Andrew J. Hazelton, Masahiko Yasuda, Takahisa Kikuchi, Yosuke Shirata, Kengo Takemasa, Yasuhiro Iriuchijima
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Overlay, law.invention, Optics, law, Multiple patterning, Node (circuits), Photolithography, business, Lithography, Immersion lithography, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9ca6149960300f71a4c88a2c4cd5fe41
https://doi.org/10.1117/12.846486 -
8
المؤلفون: Takahisa Kikuchi, Yuuki Ishii, Noriaki Tokuda
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Matching (statistics), Scanner, Computer science, Distortion, GCM transcription factors, Overlay, Grid, Algorithm, Simulation, Compensation (engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8fb4c5c2ae875b5347731dec5dc53d6b
https://doi.org/10.1117/12.435702